Dynamic characterization of a linear electrostatic micromotor supported on microball bearings

Sensors and Actuators, A: Physical

Volumn 136, Issue 2, 2007, Pages 496-503

  Ghalichechian, Nima ^a   Modafe, Alireza ^a   Lang, Jeffrey H ^b   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b USA   (United States)

Author keywords

Characterization; Microball bearing; Micromotor; Variable capacitance

Indexed keywords

CAPACITANCE; COMPUTER SOFTWARE; IMAGE PROCESSING; MAGNETIC BEARINGS; MICROMACHINING; VIDEO CAMERAS;

MICROBALL BEARING; MICROMOTOR; VARIABLE-CAPACITANCE;

ELECTROSTATIC DEVICES;

EID: 34247593738     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.08.019     Document Type: Article

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