M3-Deterministic, multiscale, multirobot Platform for microsystems packaging: Design and quasi-static precision evaluation

IEEE Transactions on Automation Science and Engineering

Volumn 6, Issue 2, 2009, Pages 345-361

  Popa, Dan O ^a   Murthy, Rakesh ^a   Das, Aditya N ^a  

^a University of Texas at Arlington   (United States)

Author keywords

Microassembly; MOEMS; Multiscale; Packaging; Precision; Robotics

Indexed keywords

ASSEMBLY TASKS; ASSEMBLY YIELDS; ATTACHMENT PROCESS; BONDING PROCESS; END-EFFECTORS; HETEROGENEOUS MATERIALS; HIGH YIELDS; INTEGRATED SENSORS; MICRO-ROBOTS; MICRO-SCALES; MICROASSEMBLY; MICROELECTROMECHANICAL SYSTEMS SWITCHES; MOEMS; MULTI ROBOTS; MULTI-ROBOT SYSTEMS; MULTISCALE; MULTISCALE NATURES; NANO SCALE; NEXT GENERATION ROBOTS; PRECISION; PRECISION DESIGNS; PRECISION EVALUATIONS; QUASI STATICS; RECONFIGURABLE CHARACTERISTICS; SHARED WORKSPACES; SYSTEM COMPONENTS; TOLERANCE BUDGETS;

COST EFFECTIVENESS; FITS AND TOLERANCES; INDUSTRIAL RESEARCH; INDUSTRIAL ROBOTS; INVERSE KINEMATICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PACKAGING MATERIALS; REAL TIME SYSTEMS; ROBOTICS; SEALING (CLOSING); VISUAL SERVOING;

ROBOTIC ASSEMBLY;

EID: 64049094285     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2008.2010074     Document Type: Article

References (45)

1. Y. Bellouard, "Microrobotics, microdevices based on shape-memory alloys," in Encyclopedia of Smart Materials. New York:Wiley, 2002, pp. 620-644.
2. H. Bleuler and J. M. Breguet, "Microfactory and microrobotics activities in Europe," in Proc. Int. Workshop on Micro-Factory (IWMF), Tsukuba, Japan, 1998.
3. H. van Brussel, J. Peirs, D. Reynaerts, A. Delchambre, and G. Reinhart et al., "Assembly of microsystems," Ann. CIRP, vol. 49, no. 2, pp. 451-472, 2000.
4. H. Bleuler, R. Clavel, J. M. Breguet, H. Langen, and E. Pernette, "Issues in precision motion control and microhandling," in Proc. IEEE Int. Conf. Robot. Autom., ICRA 2000, San Francisco, CA, pp. 959-964.
5. R. Eberhardt, M. Mohaupt, and T. Scheller, "Hybrid assembly of microoptical systems," in Proc. World Microtechnologies Congress: Applications-Trends-Visions, Berlin, Germany, 2000, vol. 1, pp. 459-464.
6. S. Fatikow, J. Seyfriedl, S. Fahlbuschl, A. Buerklel, and F. Schmoeckell, "A flexible microrobot-based microassembly station," J. Intell. Robot. Syst., vol. 27, no. 1-2, pp. 135-169, Jan. 2000.
7. M. B. Cohn, K. F. Bohringer, J. M. Noworolski, A. Singh, and C. G. Keller et al., "Microassembly technologies for MEMS," SPIE Micromach. Microfab., vol. 3511, pp. 2-16.
8. N. Dechev, L. Ren, W. Liu, W. L. Cleghorn, and J. K. Mills, "Development of a 6 degree of freedom robotic manipulator for use in 3DMEMS microassembly," in Proc. IEEE Int. Conf. Robot. Autom., ICRA 2006, Orlando, Florida, pp. 281-288.
9. K. Goldberg, K. F. Bohringer, and R. Fearing, "MicroAssembly," in Handbook of Industrial Robotics, S. Nof, Ed., 2nd ed. New York: Wiley, 1999, pp. 1045-1066.
10. A. Codourey, M. Rodriguez, and I. Pappas, "A task-oriented teleoperation system for assembly in the microworld," in Proc. 8th Int. Conf. Adv. Robot., ICAR 1997, Monterey, CA, 1997, pp. 235-240.
11. W. J. Shakespeare, "Optical alignment in optoelectronic components," Advancing Microelectronics, vol. 29, no. 1, Jan./Feb. 2002.
12. O. T. Strand and M. E. Lowry, "Automated fiber pigtailing technology," in Proc. Electron. Comp. Technol. Conf., 1994, pp. 1000-1003.
13. C. R.Witham, "Fiber-optic pigtail assembly and attachment alignment shift using a low-cost robotic platform," in Proc. Electron. Comp. Technol. Conf., 2000, pp. 21-25.
14. J. Sin, D. Popa, and H. Stephanou, "Model based automatic fiber alignment," in Proc. SMTA NEPCON West Conf., San Diego, CA, Dec. 2002.
15. T. Hirano and K. Furata, "Micromachine technology trends in microfactory," in Proc. Int. Workshop on Micro-Factory (IWMF), Minneapolis, MN, Sep. 2002.
16. D. O. Popa, B. H. Kang, and J. Sin, "Reconfigurable microassembly system for photonics applications," in Proc. IEEE Conf. Robot. Autom., ICRA 2002, Washington, D.C., vol. 2, pp. 1495-1500.
17. D. O. Popa, B. H. Kang, J. Wen, H. Stephanou, G. Skidmore, and A. Geisberger, "Dynamic modeling and open-loop control of thermal bimorph MEMS actuators," in Proc. IEEE Int. Conf. Robot. Autom., ICRA 2003, Taipei, Taiwan, pp. 1470-1475.
18. D. O. Popa and H. Stephanou, "Micro and meso scale robotic assembly," SME J. Manuf. Processes, vol. 6, no. 1, pp. 52-71, 2004.
19. M. Hohn and C. Robl, "Qualification of standard industrial robots for microassembly," in Proc. IEEE Int. Conf. Robot. Autom., ICRA 1999, Detroit, MI, pp. 3085-3090.
20. A. A. Rizzi, J. Gowdy, and R. L. pollis, "Distributed coordination in modular precision assembly systems," Int. J. Robot. Res., vol. 20, no. 10, pp. 819-838, October 2001.
21. W. H. Lee, B. H. Kang, Y. S. Oh, H. Stephanou, A. C. Sanderson, G. Skidmore, and M. Ellis, "Micropeg manipulation with a compliant microgripper," in Proc. IEEE Conf. Robot. Autom., ICRA 2002, Washington, D.C., pp. 3213-3218.
22. M. Mikawa, "Visual servoing for micro mass axis alignment device," in Proc. IEEE/RSJ Int. Conf. Intell. Robot. Syst. (IROS), 1996, pp. 1091-1096.
23. Y. Zhou, B. J. Nelson, and B. Vikramaditya, "Integrating optical force sensing with visual servoing for microassembly," J. Inteil. Robot. Syt., 2002.
24. Y. Ge, J. A. Gaines, and B. J. Nelson, "Open-structure reconfigurable experimental work-station for fast and reliable microassembly," in Proc. SPIE Microrobotics and Microassembly II, Boston, MA, Nov. 2000, pp. 21-32.
25. S. J. Ralis, B. Vikramaditya, and B. J. Nelson, "Micropositioning of a weakly calibrated microassembly system using coarse-to-fine visual servoing strategies," IEEE Trans. Electron. Packag. Manuf., vol. 23, no. 2, pp. 123-131, Apr. 2000.
26. R. M. Murray, Z. Li, and S. S. Sastry, Mathematical Introduction to Robotic Manipulation. New York: CRC Press, 1994.
27. D. O. Popa, M. Deeds, A. Fasoro, and H. Beardsley et al., "Automated assembly and hermetic packaging of MOEMS for applications requiring extended self-lives," in Proc. ASME IMECE, Nov. 5-11, 2005.
28. A. A. Rizzi, J. Gowdy, and R. L. Hollis, "Agile assembly architecture: An agent based approach to modular precision assembly systems," in Proc. 1997 IEEE Int. Conf. Robot. Autom., ICRA 1997, pp. 1511-1516.
29. N. Isam, N. Tahhan, Y. Zhuang, K. F. Bohringer, K. S. J. Pister, and K. Goldberg, "MEMS fixtures for handling and assembly of microparts," in Proc. SPIE's 1999 Symp. Micromac. Microfab., Santa Clara, CA, Sep. 1999, vol. 3876, pp. 129-139.
30. S. Jang, "Automation manufacturing systems technology for opto-electronic device packaging," in Proc. Electron. Comp. Technol. Conf., 2000, pp. 10-14.
31. R. S. Fearing, "Survey of sticking effects for micro parts handling," in Proc. IEEE/RSJ Int. Conf. Intell. Robot. Syst. (IROS), 1995, pp. 212-217.
32. M. Greenstein, "Optical absorption aspects of laser soldering for high density interconnects," Appl. Opt., vol. 28, no. 21, 2000.
33. L. Liwei, "MEMS post-packaging by localized heating and bonding," IEEE Trans. Adv. Packag., vol. 23, pp. 608-616, Nov. 2000.
34. K. Gilleo, "MEMS packaging solutions," Electron. Packag. Prod., pp. 49-52, Jun. 2000.
35. J. T. Feddema and R. W. Simon, "Visual servoing and CAD-driven microassembly," Robot. Autom. Mag., vol. 5, no. 4, pp. 18-24, Dec. 1998.
36. B. Harris, D. Cook, and F. L. Lewis, "A matrix formulation for integrating assembly trees and manufacturing resource planning (MRP) with capacity constraints," J. Intell. Manuf., vol. 13, no. 4, pp. 239-252, Aug. 2002.
37. 3 : Multiscale, deterministic micro-nano assembly system for construction of on-wafer microrobots," in Proc. IEEE Int. Conf. Robot. Autom., ICRA 2007, Roma, Italy, pp. 461-466.
38. A. S. Wallack and I. Mazon, "Calibration of four degree of freedom Robotworld modules," in Proc. IEEE Int. Conf. Robot. Autom., ICRA 1996, pp. 987-993.
39. S. Shekhar, O. Khatib, and M. Shimojo, "Object localization with multiple sensors," Int. J. Robot. Re., vol. 7, no. 6, pp. 34-44, 1988.
40. A. Lal, Y. Miyahara, R. Perez, J. M. Breguet, and H. Bleuler, "Application of SPM technology for position sensing in micro-nano robotics," in Proc. 3rd Int. Workshop on Microfactories (IWMF'02), Minneapolis, MN, Sep. 2002.
41. A. H. Slocum, "Precision machine design: Micromachine design philosophy and its applicability to the design of micromachines," in Proc. 1992 MEMS Conf., Travemunde, Germany, Feb. 4-7, 1992, pp. 37-42.
42. J.-F. Brethe and B. Dakyo, "A stochastic ellipsoid approach to repeatability modelisation of industrial manipulator robots," in Proc. IEEE/RSJ Int. Conf. Intelligent Robots and Systems (IROS) 2002, Lausanne, Switzerland, Oct. 2002, pp. 1608-1613.
43. Manipulating Industrial Robots-Performance Criteria and Related Test Methods, ISO 9283, Aug. 1998.
44. B. Greenway, "Tutorial: Robot accuracy," Ind. Robot J., vol. 27, no. 4, pp. 257-265, 2000.
45. N. G. Dagalakis, "Industrial robotics standards," in Handbook of Industrial Robotics, S. Y. Nof, Ed. New York: Wiley, 1998, ch. 27.