μ3: Multiscale, deterministic micro-nano assembly system for construction of on-wafer microrobots

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2007, Pages 461-466

  Das, Aditya N ^a   Zhang, Ping ^a   Lee, Woo H ^a   Popa, Dan ^a   Stephanou, Harry ^a  

^a Department of Electrical Engineering ^*

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX OPERATIONS; MICROROBOTS; MICROSCALE MECHANICS; WAFER MICROROBOTS;

DEGREES OF FREEDOM (MECHANICS); INTELLIGENT ROBOTS; MEMS; ROBUSTNESS (CONTROL SYSTEMS); SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

MOBILE ROBOTS;

EID: 36349029738     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2007.363829     Document Type: Conference Paper

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