Open-structure reconfigurable experimental workstation for fast and reliable microassembly

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4194, Issue , 2000, Pages 21-32

  Yang, Ge ^a   Gaines, James A ^a   Nelson, Bradley J ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); GRAPHICAL USER INTERFACES; GRIPPERS; IMAGING SYSTEMS; MANIPULATORS; MICROMACHINING; MOTION CONTROL; PIEZOELECTRIC DEVICES; REACTIVE ION ETCHING; SILICON WAFERS;

MICROASSEMBLY; MICROGRIPPERS; MICROMANIPULATORS; PIEZOELECTRIC FORCE SENSORS; TELEOPERATION;

ROBOTIC ASSEMBLY;

EID: 0034514828     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.403700     Document Type: Conference Paper

References (13)