Development of a 6 degree of freedom robotic micromanipulator for use in 3D MEMS microassembly

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2006, Issue , 2006, Pages 281-288

  Dechev, Nikolai ^a   Ren, Lu ^b   Liu, William ^b   Cleghorn, William L ^b   Mills, James K ^b  

^a UNIVERSITY OF VICTORIA   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

6 DOF; Large workspace; MEMS; Microassembly; Micromanipulator

Indexed keywords

COMPUTER SOFTWARE; DEGREES OF FREEDOM (MECHANICS); END EFFECTORS; MICROELECTROMECHANICAL DEVICES; ROBOTICS;

CARTESIAN AXES; DEGREES OF ROTATION; MICROASSEMBLY; MICROMANIPULATOR;

MICROMANIPULATORS;

EID: 33746280901     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2006.1641725     Document Type: Conference Paper

References (14)

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