Indentation and imprint mapping for the identification of interface properties in film-substrate systems

International Journal of Fracture

Volumn 155, Issue 1, 2009, Pages 1-17

  Bocciarelli, M ^a   Bolzon, Gabriella ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Film substrate systems; Imprint mapping; Indentation; Interface properties; Inverse analysis

Indexed keywords

INVERSE PROBLEMS; MATERIALS; MATERIALS HANDLING EQUIPMENT; SUBSTRATES;

BULK MATERIALS; COHESIVE ELEMENTS; COMPUTATIONAL EFFORTS; CONVENTIONAL OPTIMIZATIONS; DETERMINISTIC APPROACHES; DIFFERENT SCALE; EXPERIMENTAL DATUM; EXTERNAL SURFACES; FILM SUBSTRATE SYSTEMS; FINITE ELEMENT MODELS; FINITE STRAINS; FRACTURE PROPERTIES; HORIZONTAL DISPLACEMENTS; IMPRINT MAPPING; INDENTATION TESTS; INTERFACE PROPERTIES; INVERSE ANALYSIS; MATERIAL PARAMETERS; MECHANICAL RESPONSE; NUMERICAL COMPUTATIONS; NUMERICAL SIMULATIONS; RECURSIVE CALCULATIONS; RESIDUAL DEFORMATIONS;

IDENTIFICATION (CONTROL SYSTEMS);

EID: 59749085578     PISSN: 03769429     EISSN: 15732673     Source Type: Journal    
DOI: 10.1007/s10704-009-9314-y     Document Type: Article

References (54)

1. Abdul-Baqi A, Van der Giessen E (2001) Indentation-induced interface delamination of a strong film on a ductile substrate. Thin Solid Films 381:143-154
2. Abdul-Baqi A, Van der Giessen E (2002) Numerical analysis of indentation-induced cracking of brittle coatings on ductile substrates. Int J Solids Struct 39:1427-1442
3. Alexopoulos PS, O'Sullivan TC (1990) Mechanical properties of thin films. Ann Rev Mater Sci 20:391-420
4. Aoki S, Amaya K, Sahashi M, Nakamura T (1997) Identification of Gurson's material by using Kalman filter. Comput Mech 19:501-506
5. Baker SP (1997) Between nanoindentation and scanning force microscopy: measuring mechanical properties in the nanometer regime. Thin Solid Films 308-309:289-296
6. Bamnios Y, Douka E, Trochidis A (2002) Crack identification in beam structures using mechanical impedance. J Sound Vib 256:287-297
7. Berfield T, Patel J, Shimmin R, Braun P, Lambros J, Sottos N (2007) Micro- and nanoscale deformation measurement of surface and internal planes via digital image correlation. Exp Mech 47:51-62
8. Bhattacharya AK, Nix WD (1998) Finite element simulation of indentation experiments. Int J Solids Struct 24:881-891
9. Bocciarelli M, Bolzon G (2007) Indentation and imprint mapping for the identification of constitutive parameters of thin layers on substrate: perfectly bonded interfaces. Mater Sci Eng A 448:303-314
10. Bocciarelli M, Maier G (2007) Indentation and imprint mapping method for identification of residual stresses. Comput Mater Sci 39:381-392
11. Bocciarelli M, Bolzon G, Maier G (2005) Parameter identification in anisotropic elastoplasticity by indentation and imprint mapping. Mech Mater 37:855-868
12. Bocciarelli M, Bolzon G, Maier G (2008) A constitutive model of metal-ceramic functionally graded material behavior: Formulation and parameter identification. Comput Mater Sci 43:16-26
13. Bolzon G, Corigliano A (1997) A discrete formulation for elastic solids with damaging interfaces. Comput Methods Appl Mech Eng 140:329-359
14. Bolzon G, Maier G, Tin-Loi F (1997) On multeplicity of solutions in quasi-brittle fracture computations. Comput Mech 19:511-516
15. Bolzon G, Maier G, Panico M (2004) Material model calibration by indentation, imprint mapping and inverse analysis. Int J Solids Struct 41:2957-2975
16. Capehart TW, Cheng Y-T (2003) Determining constitutive models from conical indentation: Sensitivity analysis. J Mater Res 18:827-832
17. Chantikul P, Lawn GR, Marshall DB (1981) A critical evaluation of indentation techniques for measuring fracture toughness. J Am Ceram Soc 64:533-543
18. Chasiotis I, Knauss WG (2002) A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy. Exp Mech 42:51-57
19. Chen J, Bull SJ (2007) Assessment of the toughness of thin coatings using nanoindentation under displacement control. Thin Solid Films 494:1-7
20. Cho S, Cardenas-Garcia JF, Chasiotis I (2005) Measurement of nanodisplacements and elastic properties of MEMS via the microscopic hole method. Sens Actuators A 120:163-171
21. Cho SW, Chasiotis I (2007) Elastic properties and representative volume element of polycrystalline silicon for MEMS. Exp Mech 47:37-49
22. Coleman TF, Li Y (1996) An interior trust region approach for nonlinear minimisation subject to bounds. SIAM J Optim 6:418-445
23. Dao N, Chollacoop N, van Vliet KJ, Venkatesh TA, Suresh S (2001) Computational modeling of the forward and reverse problem in instrumented indentation. Acta Mater 49:3899-3918
24. Giannakopoulos AE, Suresh S (1999) Determination of elastoplastic properties by instrumented sharp indentation. Scr Mater 40:1191-1198
25. Giessibi FJ (2003) Advances in atomic force microscopy. Rev Mod Phys 75:949-983
26. 2/Ni-Cr coatings. Mech Mater 39:998-1005
27. HKS Inc, Pawtucket, RI, USA (2005) ABAQUS/Standard, Theory and User's Manuals, release 6.5-1
28. Jayaraman S, Hahn GT, Oliver WC, Rubin CA, Bastias PC (1998) Determination of monotonic stress-strain curve of hard materials from ultra-low-load indentation tests. Int J Solids Struct 35:365-381
29. Kim J, Jeong J, Lee KR, Kwon D (2003) A new indentation cracking method for evaluating interfacial adhesion energy of hard films. Thin Solid Films 441:172-179
30. Kinbara A, Baba S (1988) Adhesion measurement of non-metallic thin films using a scratch method. Thin Solid Films 163:67-73
31. Kleiber M, Antúnez H, Hien TD, Kowalczyk P (1997) Parameter sensitivity in nonlinear mechanics. Theory and finite element computations. John Wiley & Sons, Chichster
32. Knauss WG, Chasiotis I, Huang Y (2003) Mechanical measurements at the micron and nanometer scale. Mech Mater 35:217-231
33. Li W, Siegmund T (2003) An analysis of a size effect in indentation delamination of a ductile film on a elastic substrate. Scr Mater 49:497-502
34. Li W, Siegmund T (2004) An analysis of the indentation test to determine the interface toughness in a weakly bonded thin film coating-substrate system. Acta Mater 52:2989-2999
35. Liu P, Zhang YW, Zeng KY, Lu C, Lam KY (2007) Finite element analysis of interface delamination and buckling in thin film systems by wedge indentation. Eng Fract Mech 74:1118-1125
36. Maier G, Bocciarelli M, Bolzon G, Fedele R (2006) Inverse analyses in fracture mechanics. Int J Fract 138:47-73
37. Mulford R, Asaro RJ, Sebring RJ (2004) Spherical indentation of ductile power law materials. J Mater Res 19:2641-2646
38. Nakamura T, Wang T, Sampath S (2000) Determination of properties of graded materials by inverse analysis and instrumented indentation. Acta Mater 48:4293-4306
39. Ohring M (1991) The materials science of thin films. Academic Press, New York
40. Ortiz M, Suresh S (1993) Statistical properties of residual stresses and intergranular fracture in ceramic materials. ASME J Appl Mech 60:77-84
41. Ponton CB, Rawlings RD (1989) Vickers indentation fracture toughness test. Mater Sci Technol 5:865-872, 961-966
42. Rose JH, Ferrante J, Smith JR (1981) Universal binding energy curves for metals and bimetallic interfaces. Phys Rev Lett 47:675-678
43. Scrivens W, Luo Y, Sutton M, Collette S, Myrick M, Miney P, Colavita P, Reynolds A, Li X (2007) Development of patterns for digital image correlation measurements at reduced length scales. Exp Mech 47:63-77
44. Sekler J, Steinmann PA, Hintermann HE (1988) Scratch test: Different critical load determination techniques. Surf Coat Technol 36:519-529
45. Stavroulakis GE (1999) Impact-echo from a unilateral interlayer crack. LCP-BEM modelling and neural identification. Eng Fract Mech 62:165-184
46. Stavroulakis G, Bolzon G, Waszczyszyn Z, Ziemiaski L (2003) Inverse analysis. In: Karihaloo B, Ritchie RO, Milne I(eds) Comprehensive structural integrity. Elsevier Science Ltd, Kidlington (Oxfordshire), UK
47. The Math Works Inc, USA (2004) Matlab 2004. User's guide and optimization toolbox, release 6.13
48. Vendroux G, Schmidt N, Knauss WG (1998) Submicron deformation field measurements: Part 3. Demonstration of deformation determinations. Exp Mech 38:154-160
49. Vogel D, Grosser V, Schubert A, Michel B (2001) Microdac strain measurement for electronics packaging structures. Opt Lasers Eng 36:195-211
50. Vogel D, Gollhardt A, Michel B (2002) Micro- and nanomaterials characterization by image correlation methods. Sens Actuators A 99:165-171
51. Volinsky AA, Moody NR, Gerberich WW (2002) Interfacial toughness measurement for thin film on substrates. Acta Mater 50:441-466
52. Wang Y, Cuitino AM (2002) Full-field measurements of heterogeheous deformation patterns on polymeric foam using digital image correlation. Int J Solids Struct 39:3777-3796
53. Xiaodong L, Dongfeng D, Bhushan B (1997) Fracture mechanisms of thin amorphous carbon films in nano-indentation. Acta Mater 45:4453-4461
54. Xu XP, Needleman A (1993) Void nucleation by inclusion debonding in a crystal. Model Simul Mater Sci Eng 1:111-132