Dose and pressure dependence of silicon microstructure in SF 6 gas due to excimer laser irradiation

Applied Surface Science

Volumn 255, Issue 8, 2009, Pages 4664-4669

  Dehghanpour, H R ^a   Parvin, P ^a   Sajad, B ^b   Nour Azar, S S ^a  

^a AMIRKABIR UNIVERSITY OF TECHNOLOGY   (Iran)

^b ALZAHRA UNIVERSITY   (Iran)

Author keywords

ArF laser; Resonance pattern; Si microstructure; Surface wave

Indexed keywords

EXCIMER LASERS; FLUID MECHANICS; HEAT TRANSFER; LASER BEAM EFFECTS; MICROSTRUCTURE; SULFUR HEXAFLUORIDE; SURFACE WAVES;

ARF EXCIMER LASER RADIATIONS; ARF LASER; MOLTEN SILICON; PRESSURE DEPENDENCE; RESONANCE PATTERNS; RIGOROUS MODEL; SILICON MICROSTRUCTURES; UV LASER INTERACTION;

SILICON;

EID: 58349095768     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.12.024     Document Type: Article

References (30)

1. Clark S.E., and Emmoy D.C. Phys. Rev. B 40 (1989) 2031
2. Dyer P.E., Jekins S.D., and Sidhu J. Appl. Phys. Lett. 49 (1986) 453
3. Pedraza A.J., Fowlkes J.D., and Lowndes D.H. Appl. Phys. Lett. 74 16 (1999) 2322
4. Fowlkes J.D., Pedraza A.J., and Lowndes D.H. Appl. Phys. Lett. 77 11 (2000) 1629
5. Sanchez F., Morenza J.L., Aguiar R., Delgado J.C., and Varela M. Appl. Phys. Lett. 69 5 (1996) 620
6. Her T.-H., Finlay R.J., Wu C., and Mazur E. Appl. Phys. A 70 (2000) 383
7. Zorba V., Alexandrou I., Zergioti I., Manousaki A., Ducati C., Neumeister A., Fotakis C., and Amaratung G.A.J. Thin Solid Films 453-454 (2004) 492-495
8. Skantzakis E., Zorba V., Papazoglou D.G., Zergioti I., and Fotakis C. Appl. Surf. Sci. 253 (2006) 4462
9. Zhu J., Yin G., Zhao M., Chen D., and Zhao L. Appl. Surf. Sci. 245 (2005) 102-108
10. Zhao M., Yin G., Zhu J.T., and Zhao L. Chin. Phys. Lett. 20 10 (2003) 1789
11. Zhu J.T., Shen Y.F., Li W., Chen X., Yin G., Chen D.Y., and Zhao L.I. Appl. Surf. Sci. 252 (2006) 2752-2756
12. Lowndes D.L., Fowlkes J.D., and Pedraza A.J. Appl. Surf. Sci. 154/155 (2000) 647
13. Crouch C.H., Carey J.E., Warrender J.M., Aziz M.J., Mazur E., and Genin F.Y. Appl. Phys. Lett. 84 11 (2004) 1850
14. Wu C., Crouch C.H., Zhao L., Carey J.E., Younkin R., Levinson J.A., and Mazur E. Appl. Phys. Lett. 78 13 (2001) 1850
15. Her T.H., Finlay R.J., Wu C., Deliwala S., and Mazur E. Appl. Phys. Lett. 73 (1998) 1673
16. Younkin R., Carey J.E., and Mazur E. J. Appl. Phys. 93 (2003) 2626
17. Nayak B.K., Gupta M.C., and Kolasinski K.W. Appl. Surf. Sci. 253 (2007) 6580
18. Nayak B.K., Gupta M.C., and Kolasinski K.W. Nanotechnology 18 (2007) 195302
19. Riedel D., Hernandez-Pozos J.L., Palmer R.E., and Kolasinski K.W. Appl. Phys. A 78 (2004) 381
20. Mills D., Kreouzis T., Sapelkin A., Unal B., Zyuzikov N., and Kolasinski K.W. Appl. Surf. Sci. 253 (2007) 6575
21. Mills D., and Kolasinski K.W. J. Phys. D: Appl. Phys. 38 (2005) 632
22. Mills D., and Kolasinski K.W. J. Vac. Sci. Technol. A 22 4 (2004) 1647
23. Bassam M.A., Parvin P., Sajad B., Moghimi A., and Coster H. Appl. Surf. Sci. 254 (2008) 2621
24. Pedaraza A.J., Fowlkes J.D., Jesse S., Mao C., and Lowndes D.H. Appl. Surf. Sci. 168 (2000) 251
25. Billingham J., and King A.C. Wave Motion (2000), Cambridge University Press
26. Rubahn H.G. Laser Applications in Surface Science and Technology (1999), John Wiley & Sons
27. Chalmers B. Principles of Solidification (1967), John Wiley & Sons
28. Arya A. Introduction to Classical Mechanics (1990), Prentice-Hall
29. Sajad B., Parvin P., and Bassam M. J. Phys. D: Appl. Phys. 37 (2004) 3402
30. P.Enghag, Eneyclopedia of the elements, Wiley-VcH Verlag GmbH & Co. KGaA, 2004.