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Volumn 245, Issue 1-4, 2005, Pages 102-108
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Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations
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Author keywords
Femtosecond pulse; Laser ablation; Laser material processing; Microstructuring; Picosecond pulse; Surface modification of solid
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Indexed keywords
ELECTRIC CONDUCTIVITY;
LASER ABLATION;
LASER BEAM EFFECTS;
MICROSTRUCTURE;
SILICON WAFERS;
SURFACE TREATMENT;
THERMAL DIFFUSION;
FEMTOSECOND PULSES;
LASER MATERIAL PROCESSING;
MICROSTRUCTURING;
PICOSECOND PULSES;
SURFACE MODIFICATION OF SOLIDS;
SILICON;
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EID: 17044431074
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.09.113 Document Type: Article |
Times cited : (75)
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References (24)
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