메뉴 건너뛰기




Volumn 245, Issue 1-4, 2005, Pages 102-108

Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations

Author keywords

Femtosecond pulse; Laser ablation; Laser material processing; Microstructuring; Picosecond pulse; Surface modification of solid

Indexed keywords

ELECTRIC CONDUCTIVITY; LASER ABLATION; LASER BEAM EFFECTS; MICROSTRUCTURE; SILICON WAFERS; SURFACE TREATMENT; THERMAL DIFFUSION;

EID: 17044431074     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.113     Document Type: Article
Times cited : (75)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.