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Volumn 77, Issue 11, 2000, Pages 1629-1631

Microstructural evolution of laser-exposed silicon targets in SF6 atmospheres

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[No Author keywords available]

Indexed keywords


EID: 0001363955     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1308538     Document Type: Article
Times cited : (59)

References (16)
  • 1
    • 0002943026 scopus 로고
    • edited by D. B. Chrisey and G. K. Hubler Wiley Interscience, New York
    • S. R. Foltyn, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley Interscience, New York, 1994), pp. 89-113.
    • (1994) Pulsed Laser Deposition of Thin Films , pp. 89-113
    • Foltyn, S.R.1
  • 2
    • 6044229065 scopus 로고
    • M. Birnbaum, J. Appl. Phys. 36, 3688 (1965); J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
    • (1965) J. Appl. Phys. , vol.36 , pp. 3688
    • Birnbaum, M.1
  • 6
    • 77957079945 scopus 로고
    • edited by R. F. Wood, C. W. White, and R. T. Young Academic, Orlando, FL
    • R. F. Wood and G. E. Jellison, Jr., in Semiconductors and Semimetals, edited by R. F. Wood, C. W. White, and R. T. Young (Academic, Orlando, FL, 1984), Vol. 23, p. 165.
    • (1984) Semiconductors and Semimetals , vol.23 , pp. 165
    • Wood, R.F.1    Jellison G.E., Jr.2
  • 11
    • 0002890653 scopus 로고
    • edited by D. B. Chrisey and G. K. Hubler Wiley, New York, Chap. 5
    • D. B. Geohegan, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley, New York, 1994), Chap. 5. p. 115.
    • (1994) Pulsed Laser Deposition of Thin Films , pp. 115
    • Geohegan, D.B.1
  • 13
    • 0032591619 scopus 로고    scopus 로고
    • Microcrystalline and Nanocrystalline Semiconductors, edited by M. J. Sailorb C. C. Tsai, L. T. Canham, and K. Tanaka
    • T. Makimura, T. Mizuta, T. Ueda, and K. Murakami, in Microcrystalline and Nanocrystalline Semiconductors, edited by M. J. Sailorb C. C. Tsai, L. T. Canham, and K. Tanaka [Mater. Res. Soc. Symp. Proc. 536, 51 (1999)].
    • (1999) Mater. Res. Soc. Symp. Proc. , vol.536 , pp. 51
    • Makimura, T.1    Mizuta, T.2    Ueda, T.3    Murakami, K.4
  • 14
    • 85037508936 scopus 로고    scopus 로고
    • note
    • Note that typical expansion velocities are 1-2 cm/μs for laser-generated plasmas in vacuum, so that the plasma expands only 1-2 mm during the 0.1 μs melt duration, even in vacuum.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.