Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres

Applied Surface Science

Volumn 168, Issue 1-4, 2000, Pages 251-257

  Pedraza, A J ^a   Fowlkes, J D ^a   Jesse, S ^a   Mao, C ^a   Lowndes, D H ^b  

^a University of Tennessee Knoxville   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; EARTH ATMOSPHERE; EXCIMER LASERS;

SURFACE MICROSTRUCTURING;

SILICON;

EID: 0034506386     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00611-5     Document Type: Article

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