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Volumn 78, Issue 3, 2004, Pages 381-385

Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LASER APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; SEPARATION; SUBSTRATES;

FEMTOSECOND PULSED LASER; OPTICAL DIFFRACTION; SILICON CONES; ULTRAFAST LASER ETCHING;

SEMICONDUCTING SILICON;

EID: 0742321197 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-002-1938-y Document Type: Article

Times cited : (47)

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