The fabrication of non-spherical microlens arrays utilizing a novel SU-8 stamping method

Journal of Micromechanics and Microengineering

Volumn 18, Issue 12, 2008, Pages

  Kuo, Shu Ming ^a   Lin, Che Hsin ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; GLASS; GLASS TRANSITION; LENSES; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; OPTICAL INSTRUMENTS; OPTICAL PROPERTIES; OPTICAL SYSTEMS; PHOTORESISTS; REFRACTIVE INDEX; SPHERES; STAMPING;

CROSSLINKED; DOSAGE CONTROLS; EXPERIMENTAL INVESTIGATIONS; FOCAL LENGTHS; GLASS SUBSTRATES; GLASS TRANSITION TEMPERATURES; HIGH REFRACTIVE INDICES; HIGH TRANSMITTANCES; IR WAVELENGTHS; MICROLENS ARRAYS; NOVEL METHODS; NOVEL PROCESSES; NOZZLE ARRAYS; NUMERICAL APERTURES; OPTICAL APPLICATIONS; PROCESS TEMPERATURES; RADII OF CURVATURES; SPHERICAL LENSES; STAMPING METHODS; STAMPING PROCESSES; SURFACE PROFILES; WORKING TEMPERATURES;

PROCESS CONTROL;

EID: 58149352284     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/12/125012     Document Type: Article

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