3D high aspect ratio micro structures fabricated by one step UV lithography

Journal of Micromechanics and Microengineering

Volumn 17, Issue 2, 2007, Pages 291-296

  Huang, H ^a   Yang, W ^a   Wang, T ^a   Chuang, T ^a   Fu, C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROFABRICATION; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION;

3D MICROSTRUCTURES; UV LITHOGRAPHY;

MICROSTRUCTURE;

EID: 34249038396     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/2/015     Document Type: Article

References (7)

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3. Huang H and Fu C 2005 Out-of-plane polymer hollow micro-needle array integrated on a microfluidic chip Proc. IEEE Sensors pp 484-7
4. Huang H and Fu C 2006 Out-of-plane polymer hollow micro-needle array integrated on a flexible membrane Proc. ISNMT-2 pp 305-09
5. Chiu S, Huang H, Chuang C Y and Fu C 2006 A novel framework of making PLA/PLGA polymer micro needles patch for better skin piercing and drug release Proc. MicroTas pp 1531-3
6. Vora K, Peele A, Shew B, Harvey E and Hayes J 2006 Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures Microsyst. Technol. at press (available online: DOI 10.1007/s00542-006-0201-4)
7. Mulhern G T, Soane D S and Howe R G 1993 Supercritical carbon dioxide drying for microstructures Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Transducers'93 (Yokohama, Japan) pp 296-9