Fabrication and characterization of three-dimensional microlens arrays in sol-gel glass

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1159-1164

  Orhan, Jean Baptiste ^a   Parashar, Virendra Kumar ^a   Sayah, Abdeljalil ^a   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

Author keywords

Micro optics; Microlens array; Micromoulding; Photoresist; Poly dimethylsiloxane (PDMS) replication; Sol gel glass; Thermal softening

Indexed keywords

MICROLENS ARRAY; MICROMOULDING; POLY-DIMETHYLSILOXANE REPLICATION; THERMAL SOFTENING;

ARRAYS; MICROOPTICS; OPTICAL PROPERTIES; PHOTORESISTS; SEMICONDUCTING GLASS; SEMICONDUCTOR DEVICE MANUFACTURE; SHRINKAGE; SOL-GELS; SURFACE ROUGHNESS;

MICROLENSES;

EID: 33749986067     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879696     Document Type: Article

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