Novel refractive silicon microlens array using bulk micromachining technology

Sensors and Actuators, A: Physical

Volumn 88, Issue 1, 2001, Pages 87-90

  Lee, Choon Sup ^a   Han, Chul Hi ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (OPTICAL); DIFFRACTION; DIFFUSION IN SOLIDS; ETCHING; INFRARED RADIATION; MICROMACHINING; PHOTORESISTS; REFRACTIVE INDEX; SILICON WAFERS;

ETHYLENEDIAMINE PYROCATECHOL (EDP) ETCHANT; MICROLENS ARRAYS;

OPTICAL INSTRUMENT LENSES;

EID: 0035121035     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00493-3     Document Type: Article

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