A novel method to fabricate gapless hexagonal micro-lens array

Sensors and Actuators, A: Physical

Volumn 118, Issue 2, 2005, Pages 298-306

  Chou, M C ^a,c   Pan, C T ^b   Shen, S C ^c   Chen, M F ^b   Lin, K L ^a   Wu, S T ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Gapless; Hexagonal; Hot embossing; Ni Co electroplating; Passivation

Indexed keywords

COBALT PLATING; DEHYDRATION; DIFFRACTIVE OPTICS; ELECTROPLATING; GLASS TRANSITION; ION BEAMS; LITHOGRAPHY; METALLIZING; NICKEL PLATING; OPTICAL DEVICES; PASSIVATION; PHOTORESISTS; SURFACE TENSION; SYNCHROTRONS; ULTRAVIOLET RADIATION; VLSI CIRCUITS;

HEXAGONAL MICRO-LENS ARRAYS; HOT EMBOSSING; NI-CO ELECTROPLATING; PERSONAL DIGITAL ACCESSORIES (PDA);

MICROLENSES;

EID: 13244255695     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.08.015     Document Type: Article

References (24)

1. B. Ezell Making microlens backlights grow up Information Display 5 2001
2. M.E. Motamedi Micro-opto-electro-mechanical system Opt. Eng. 33 11 1994 3505 3517
3. Z.D. Popovic, R.A. Sprague, and G.A.N. Connell Technique for the monolithic fabrication of microlens arrays Appl. Opt. 27 1988 1281 1284
4. M.C. Hutley Optical techniques for the generation of microlens arrays J. Mod. Opt. 37 1990 253 265
5. J.O. Choi, J.A. Morse, J.C. Corelli, J.P. Silverman, and H. Bakhru Degradation of poly (methylmethacrylate) by deep ultraviolet, X-ray, electron beam, and proton beam irradiations J. Vac. Sci. Technol. B 6 1988 3633 3642
6. N.F. Borrelli, D.L. Morse, R.H. Bellman, and W.L. Morgon Photolytic technique for producing microlenses in photosensitive glass Appl. Opt. 24 1985 2520 2525
7. S.K. Lee, K.C. Lee, and S.S. Lee A simple method for microlens fabrication by the modified LIGA process J. Micromech. Microeng. 12 2002 334 340
8. J. Gottert, and J. Mohr Characterization of micro-optical components fabricated by deep-etch X-ray lithography SPIE: Micro-Optics II 1506 1991
9. H. Yang, M.-C. Chou, A. Yang, C.-K. Mu, and R.F. Shyu Realization of fabricating microlens array in mass production Proc. SPIE 3739 1999
10. H. Yang, C.-T. Pan, and M.-C. Chou Ultra-fine machining tool/molds by LIGA technology J. Micromech. Microeng. 11 2001 94 99
11. W.R. Cox, T. Chen, and D. Hayes Micro-optics fabrication by ink-jet printing Opt. Photon. News 12 6 2001 32 35
12. M. Ferstl, R. Steingrueber, Commercial fabrication of microstructures and micro-optical elements for research and industrial applications, Heinrich-Hertz-Institut fürs Nachrichtentechnik Berlin GmbH, annual report 1998, 1999.
13. M.T. Gale, M. Rossi, J. Pedersen, and H. Schutz Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists Opt. Eng. 22 11 1994 3556 3566
14. K. Zimmer, D. Hirsch, and F. Bigl Excimer laser machining for the fabrication of analogous microstructures Appl. Surf. Sci. 96-98 1996 425 429
15. M. Stern, and T.R. Jay Dry etching for coherent refractive microlens arrays Opt. Eng. 33 11 1994 3547 3550
16. M.E. Matamedi, M.P. Griswold, and R.E. Knowlden Silicon microlenses for enhanced optical coupling to silicon focal planes Proc. SPIE 1544 1991
17. Y. Oppliger One step 3D shaping using a gray tone mask for optical and microelectronic applications Microelectron. Eng. 23 1994 449 454
18. S. A. Takatsuki, T.Y. Nara, S.O. Kyoto, Micro aspherical lens and fabrication method therefore and optical device, US Patent 5148322, (1992).
19. Borrelli N F, Efficiency of microlens array for projection LCD, Proceedings of the 44th Electronic Components and Technology Conference, 1994.
20. S. Chen, X. Yi, and H. Ma A novel method of fabrication of microlens arrays Infrared Phys. Technol. 44 2003 133 135
21. S. Chena, X. Yia, L. Kongb, M. Heb, and H. Wang Monolithic integration technique for microlens arrays with infrared focal plane arrays Infrared Phys. Technol. 43 2002 109 112
22. C.-S. Lee, and C.-H. Han A novel refractive silicon microlens array using bulk micromachining technology Sens. Actuators A 88 2001 87 90
23. C. Quan, S.H. Wang, C.J. Tay, I. Reading, and Z.P. Fang Integrated optical inspection on surface geometry and refractive index distribution of a microlens array Opt. Commun. 225 2003 223 231
24. Y. Fu Investigation of microlens mold fabricated by focused ion beam technology Microelectron. Eng. 56 2001 333 338