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Volumn 10, Issue 4, 2008, Pages

A glass reflowed microlens array on a Si substrate with rectangular through-holes

Author keywords

Focal length; Glass reflow; Microlens array; Si substrate; Wet etching

Indexed keywords

HOLE MOBILITY; OPTICAL GLASS; PLASTIC LENSES; RAY TRACING; SUBSTRATES; WET ETCHING;

EID: 43049105798     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/10/4/044003     Document Type: Article
Times cited : (28)

References (12)
  • 1
    • 33745852195 scopus 로고    scopus 로고
    • MicroXY stages with spider-leg actuators for two-dimensional optical scanning
    • Kwon H N, Lee J-H, Takahashi K and Toshiyoshi H 2006 MicroXY stages with spider-leg actuators for two-dimensional optical scanning Sensors Actuators A 130/131 468-77
    • (2006) Sensors Actuators , vol.130-131 , pp. 468-477
    • Kwon, H.N.1    Lee, J.-H.2    Takahashi, K.3    Toshiyoshi, H.4
  • 2
    • 0036118088 scopus 로고    scopus 로고
    • A stereoscopic display with a vibrating microlens array
    • Nakai A, Matsumoto K and Shimoyama I 2001 A stereoscopic display with a vibrating microlens array MEMS 2002 pp 524-7
    • (2001) MEMS 2002 , pp. 524-527
    • Nakai, A.1    Matsumoto, K.2    Shimoyama, I.3
  • 3
    • 0347968091 scopus 로고    scopus 로고
    • Optical characteristics of a self-aligned microlens fabricated on the side wall of a 45°-angled optical fiber
    • Jo K-W, Kim M-S, Lee J H, Kim E-K and Park K-H 2004 Optical characteristics of a self-aligned microlens fabricated on the side wall of a 45°-angled optical fiber IEEE Photon. Technol. Lett. 16 138-40
    • (2004) IEEE Photon. Technol. Lett. , vol.16 , Issue.1 , pp. 138-140
    • Jo, K.-W.1    Kim, M.-S.2    Lee, J.H.3    Kim, E.-K.4    Park, K.-H.5
  • 4
    • 34249013146 scopus 로고    scopus 로고
    • An SU-8 microlens array fabricated by soft replica molding for cell counting application
    • Kuo J-N, Hsieh C-C, Yang S-Y and Lee G-B 2007 An SU-8 microlens array fabricated by soft replica molding for cell counting application J. Micromech. Microeng. 17 693-9
    • (2007) J. Micromech. Microeng. , vol.17 , Issue.4 , pp. 693-699
    • Kuo, J.-N.1    Hsieh, C.-C.2    Yang, S.-Y.3    Lee, G.-B.4
  • 5
    • 0001640493 scopus 로고    scopus 로고
    • Characterization of a polymermicro-lens fabricated by use of the hydrophobic effect
    • Hartmann D M, Kibar O and Esener S C 2000 Characterization of a polymermicro-lens fabricated by use of the hydrophobic effect Opt. Lett. 25 975-7
    • (2000) Opt. Lett. , vol.25 , Issue.13 , pp. 975-977
    • Hartmann, D.M.1    Kibar, O.2    Esener, S.C.3
  • 6
    • 0037528553 scopus 로고    scopus 로고
    • Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask
    • Yuan X-C, Yu W X, Ngo N Q and Cheng W C 2002 Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask Opt. Express 10 303-8
    • (2002) Opt. Express , vol.10 , pp. 303-308
    • Yuan, X.-C.1    Yu, W.X.2    Ngo, N.Q.3    Cheng, W.C.4
  • 7
    • 0031274198 scopus 로고    scopus 로고
    • Design, fabrication and testing of microlens arrays for sensors and microsystems
    • Nussbaum Ph, V olkel R, Herzig H P, Eisner M and Haselbeck S 1997 Design, fabrication and testing of microlens arrays for sensors and microsystems Pure Appl. Opt. 6 617-36
    • (1997) Pure Appl. Opt. , vol.6 , Issue.6 , pp. 617-636
    • Ph, N.1    Olkel, R.V.2    Herzig, H.P.3    Eisner, M.4    Haselbeck, S.5
  • 8
    • 33646684320 scopus 로고    scopus 로고
    • Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold
    • Chang C-T, Yang S-Y, Huang L-S and Chang J-H 2006 Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold Infrared Phys. Tech. 48 163-73
    • (2006) Infrared Phys. Tech. , vol.48 , Issue.2 , pp. 163-173
    • Chang, C.-T.1    Yang, S.-Y.2    Huang, L.-S.3    Chang, J.-H.4
  • 9
    • 84865112376 scopus 로고    scopus 로고
    • A novel micromachining technology for structuring borosilicate glass substrates
    • Merz P, Quenzer H J, Bernt H, Wagner B and Zoberbiet M 2003 A novel micromachining technology for structuring borosilicate glass substrates Transducers 2003 pp 258-61
    • (2003) Transducers 2003 , pp. 258-261
    • Merz, P.1    Quenzer, H.J.2    Bernt, H.3    Wagner, B.4    Zoberbiet, M.5
  • 11
    • 34247551405 scopus 로고    scopus 로고
    • Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
    • Hedsten K, Karlen D, Bengtsson J and Enoksson P 2006 Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer J. Micromech. Microeng. 16 S88-95
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.6
    • Hedsten, K.1    Karlen, D.2    Bengtsson, J.3    Enoksson, P.4
  • 12
    • 0042045277 scopus 로고    scopus 로고
    • Hecht E 2002 Optics 4th edn (Reading, MA: Addison-Wesley) pp 574-96
    • (2002) Optics , pp. 574-596
    • Hecht, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.