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Volumn 11, Issue 6, 2001, Pages 726-732

A fast prototyping process for fabrication of microfluidic systems on soda-lime glass

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GLASS; PHOTORESISTS; POLYSILICON; SUBSTRATES; SURFACE ROUGHNESS;

EID: 0035505906     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/6/316     Document Type: Article
Times cited : (251)

References (26)
  • 4
    • 0000004795 scopus 로고
    • Micromachining of capillary electrophoresis injectors and separators on glass chips and evaluation of flow at capillary intersections
    • (1994) Anal. Chem. , vol.66 , pp. 177-184
    • Fan, Z.H.1    Harrison, D.J.2
  • 16
    • 0027811007 scopus 로고
    • Review: Wet chemical etching of silicate glasses in hydrofluoric acid based solutions
    • (1993) J. Mater. Sci. , vol.28 , pp. 6261-6273
    • Spierings, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.