A fast prototyping process for fabrication of microfluidic systems on soda-lime glass

Journal of Micromechanics and Microengineering

Volumn 11, Issue 6, 2001, Pages 726-732

  Lin, Che Hsin ^a   Lee, Gwo Bin ^a   Lin, Yen Heng ^a   Chang, Guan Liang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GLASS; PHOTORESISTS; POLYSILICON; SUBSTRATES; SURFACE ROUGHNESS;

BUFFERED OXIDE ETCHING (BOE);

FLUIDIC DEVICES;

EID: 0035505906     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/6/316     Document Type: Article

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