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Volumn 11, Issue 6, 2001, Pages 726-732
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A fast prototyping process for fabrication of microfluidic systems on soda-lime glass
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
GLASS;
PHOTORESISTS;
POLYSILICON;
SUBSTRATES;
SURFACE ROUGHNESS;
BUFFERED OXIDE ETCHING (BOE);
FLUIDIC DEVICES;
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EID: 0035505906
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/11/6/316 Document Type: Article |
Times cited : (251)
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References (26)
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