A novel method for fabrication of plastic microlens array with aperture stops for projection photolithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 5 A, 2007, Pages 2932-2935

  Chang, Chin Yuan ^a   Yang, Sen Yeu ^a   Wu, Meng Sheng ^a   Jiang, Liang Ting ^a   Wang, Lon A ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Aperture stop; Hot press; Microlens array; Microlens projection lithography; Shadow mask

Indexed keywords

IMAGE ACQUISITION; PHOTOLITHOGRAPHY; PLASTICS; POLYMERS; STAINLESS STEEL; SURFACE TENSION; THERMOPLASTICS;

APERTURE STOPS; MICROLENS PROJECTION LITHOGRAPHY; PLASTIC MICROLENS ARRAY; SHADOW MASK;

MICROLENSES;

EID: 34547864675     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.2932     Document Type: Article

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