Inkjet printing of SU-8 for polymer-based mems a case study for microlenses

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 407-410

  Fakhfouri, V ^a   Cantale, N ^a   Mermoud, G ^a   Kim, J Y ^a   Boiko, D ^a   Charbon, E ^a   Martinoli, A ^a   Brugger, J ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; CONTROL SYSTEM ANALYSIS; CONTROL THEORY; DROPS; FLUID MECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; OPTICAL PROPERTIES; PARAMETER ESTIMATION; POLYMERS; PRINTING; REACTIVE ION ETCHING; SEMICONDUCTING CADMIUM TELLURIDE;

A-STABLE; ARBITRARY PATTERNS; CASE STUDIES; CONTROL PARAMETERS; DIFFERENT SUBSTRATES; DROP-ON DEMAND; FUNCTIONAL MATERIALS; INK-JET PRINTING; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NOVEL METHODS; OPTICAL LENSES; POLYMER DROPS; POLYMER MEMS; POLYMER-BASED MEMS; PRINTED PATTERNS; SPECIAL EMPHASIS; SURFA CE WETTING;

PHOTORESISTS;

EID: 50149089807     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443679     Document Type: Conference Paper

References (12)

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