Vacuum suction aid for microlens array formation using LIGA-like process

International Journal of Advanced Manufacturing Technology

Volumn 29, Issue 5, 2006, Pages 518-523

  Shyu, Ruey Fang ^a   Yang, Hsiharng ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Electroforming; Microlens array; Molding; Vacuum suction

Indexed keywords

ELECTROFORMING; FABRICATION; METALLIC MATRIX COMPOSITES; NOZZLES; PHOTORESISTORS; SUBSTRATES;

METALLIC MOLDS; MICROLENS ARRAY FORMATION; OPTICAL LENS GEOMETRY; VACUUM PRESSURE;

MICROLENSES;

EID: 33745713654     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-005-2549-5     Document Type: Article

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