Spherical and aspheric microlenses fabricated by excimer laser LIGA-like process

Journal of Manufacturing Science and Engineering

Volumn 129, Issue 1, 2007, Pages 126-134

  Lee, Yung Chun ^a   Chen, Chun Ming ^a   Wu, Chun Ying ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Excimer laser; LIGA like process; Microfabrication; Microlens

Indexed keywords

EXCIMER LASERS; LASER APPLICATIONS; MICROMACHINING; PROBABILITY; SURFACE TREATMENT;

3D MICROSTRUCTURE; CONTINUOUS SURFACE PROFILES; LIGA-LIKE PROCESS; PLANETARY SCANNING METHOD;

MICROLENSES;

EID: 34248212295     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2401622     Document Type: Article

References (21)

1. Sinzinger, S., and Jahns, J., 2003, Microoptics, 2nd ed., Wiley-VCH, Weinheim, Germany.
2. Kress, B., and Meyrueis, P., 2000, Digital Diffractive Optics, J Wiley, New York.
3. Sakai, J.-I., and Kimura, T., 1980, "Design of a Miniature Lens for Semiconductor Laser to Single-Mode Fiber Coupling," IEEE J. Quantum Electron., 16(10), pp. 1059-1067.
4. Nicia, A., 1981, "Lens Coupling in Fiber-Optic Devices: Efficiency Limit," Appl. Opt., 20(18), pp. 3136-3145.
5. Sumida, M., and Takemoto, K., 1984, "Lens Coupling of Laser Diodes to Single-Mode Fibers," J. Lightwave Technol., 2(3), pp. 305-311.
6. Hillerich, B., 1989, "Influence of Lens Imperfections With LD and LED to Single-Mode Fiber Coupling," J. Lightwave Technol., 7(1), pp. 77-86.
7. Edwards, C. A., Presby, H. M., and Dragone, C., 1993, "Ideal Microlenses for Laser to Fiber Coupling," J. Lightwave Technol., 11(2), pp. 252-257.
8. Park, E.-H., Kim, M.-J., and Kwon, Y.-S., 1999, "Microlens for Efficient Coupling Between LED and Optical Fiber," IEEE Photonics Technol. Lett., 11(4), pp. 439-441.
9. Tein, C.-H., Chien, Y.-E., Chiu, Y., and Shien, H.-P., 2003, "Microlens Array Fabricated by Excimer Laser Micromachining With Gray-Tone Photolithography," Jpn. J. Appl. Phys., Part 1, 42, pp. 1280-1283.
10. Zimmer, K., Hirsch, D., and Bigl, F., 1996, "Excimer Laser Machining for the Fabrication of Analogous Microstructures," Appl. Surf. Sci., 96-98, pp. 425-429.
11. Naessens, K., Ottevaere, H., Daele, P. V., and Baets, R., 2003, "Flexible Fabrication of Microlenses in Polymer Layers With Excimer Laser Ablation," Appl. Surf. Sci., 208-209(1), pp. 159-164.
12. Naessens, K., Ottevaere, H., Baets, R., Daele, P. V., and Thienpont, H., 2003, "Direct Writing of Microlenses in Polycarbonate With Excimer Laser Ablation," Appl. Opt., 42(31), pp. 6349-6359.
13. Brannon, J., 1993, Excimer Laser Ablation and Etching, American Vacuum Society, New York.
14. Galantucci, L. M., and Giusti, F., 1998, "Excimer Laser Cutting: Experimental Characterization and 3D Numerical Modeling for Polyester Resins," CIRP Ann., 47, pp. 141-144.
15. Zimmer, K., Braun, A., and Bigl, F., 2000, "Combination of Different Processing Methods for the Fabrication of 3D Polymer Structures by Excimer Laser Machining," Appl. Surf. Sci., 154-155, pp. 601-604.
16. Braun, A., Zimmer, K., Hosselbarth, B., Meinhardt, J., Bigl, F., and Mehnert, R., 1998, "Excimer Laser Micromachining and Replication of 3D Optical Surface," Appl. Surf. Sci., 127-129, pp. 911-914.
17. Arnold, J., Dasbach, U., Ehrfeld, W., Hesch, K., and Lowe, H., 1995, "Combination of Excimer Laser Micromachining and Replication Processes Suited for Large Scale Production," Appl. Surf. Sci., 86(1), pp. 251-258.
18. Lee, Y.-C., Chen, C.-M., and Wu, C.-Y., 2005, "A New Excimer Laser Micromachining Method for Axially Symmetric 3D Microstructures With Continuous Surface Profiles," Sens. Actuators, A, 117(2), pp. 349-355.
19. Neider, A., and Mead, R., 1965, "A Simplex Method for Function Minimization," Comput. J., 7, pp. 308-313.
20. Press, W. H., Flannery, B. P., Teukolsky, S. A., and Vetterling, W. T., 1986, Numerical Recipes, Cambridge U. P., New York.
21. Dennis, J. K., and Such, T. E., 1993, Nickel and Chromium Plating, 3rd ed., Woodhead, Cambridge, UK.