Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2499-2503

  Shih, Teng Kai ^a   Chen, Chia Fu ^a   Ho, Jeng Rong ^b   Chuang, Fang Tzu ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Diffuser; Microlens; PDMS; Replica molding

Indexed keywords

ARRAYS; OPTICAL PROPERTIES; ORGANIC POLYMERS; PLASTICS MOLDING; SPIN COATING; SURFACE ROUGHNESS;

DIFFUSERS; MICROLENS ARRAYS; POLYDIMETHYLSILOXANE (PDMS); REPLICA MOLDING;

MICROLENSES;

EID: 33751242782     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.05.006     Document Type: Article

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