Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions

Microporous and Mesoporous Materials

Volumn 118, Issue 1-3, 2009, Pages 458-466

  Eslava, Salvador ^a,b   Kirschhock, Christine E A ^b   Aldea, Steliana ^b   Baklanov, Mikhail R ^a   Iacopi, Francesca ^a   Maex, Karen ^a,b   Martens, Johan A ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Film; Low k; Membrane; Silicalite; Zeolite

Indexed keywords

ATOMIC SPECTROSCOPY; ELLIPSOMETRY; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; NANOCRYSTALLINE ALLOYS; NANOCRYSTALS; NANOPARTICLES; OPTICAL INTERCONNECTS; POROUS SILICON; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICATE MINERALS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; SPIN DYNAMICS; SUSPENSIONS (COMPONENTS); X RAY DIFFRACTION ANALYSIS;

ATOMIC FORCES; CRYSTALLINITY; CRYSTALLIZATION TIMES; DIELECTRIC CONSTANTS; ELLIPSOMETRIC POROSIMETRY; FOURIER TRANSFORM INFRARED; IMPEDANCE ANALYSES; LOW-K; NANOPARTICLE SUSPENSIONS; NANOZEOLITE; ON-CHIP INTERCONNECTS; POROUS FILMS; SILICALITE; SPIN-ON; X-RAY DIFFRACTIONS; ZEOLITE FILMS;

ZEOLITES;

EID: 57649233534     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2008.09.027     Document Type: Article

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