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Advanced Materials

Volumn 13, Issue 10, 2001, Pages 746-749

Pure-silica zeolite low-k dielectric thin films

(5) Wang, Z a Wang, H a Mitra, A a Huang, L a Yan, Y a

a United States (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROPHILICITY; INORGANIC COMPOUNDS; ORGANIC POLYMERS; PERMITTIVITY; PORE SIZE; POROUS MATERIALS; SILICA; STRENGTH OF MATERIALS; THERMAL CONDUCTIVITY; THERMODYNAMIC STABILITY; ZEOLITES;

DIELECTRIC APPLICATIONS; SOL-GEL SILICA;

DIELECTRIC MATERIALS;

EID: 0035902002 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/1521-4095(200105)13:10<746::AID-ADMA746>3.0.CO;2-J Document Type: Article

Times cited : (279)

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