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Advanced Materials

Volumn 13, Issue 19, 2001, Pages 1463-1466

Pure silica zeolite films as low-k dielectrics by spin-on of nanoparticle suspensions

(5) Wang, Z B a Mitra, A a Wang, H T a Huang, L M a Yan, Y a

a University of California Riverside (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROPHOBICITY; ISOTHERMS; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PORE SIZE; POROUS MATERIALS; SILICON WAFERS; SUSPENSIONS (FLUIDS); THICK FILMS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

POROUS FILMS; SPIN ON PROCESS;

ZEOLITES;

EID: 0035797859 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/1521-4095(200110)13:19<1463::AID-ADMA1463>3.0.CO;2-H Document Type: Article

Times cited : (200)

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