Microcantilever-based force tracking with applications to high-resolution imaging and nanomanipulation

IEEE Transactions on Industrial Electronics

Volumn 55, Issue 11, 2008, Pages 3935-3943

  Saeidpourazar, Reza ^a   Jalili, Nader ^a  

^a AMRL   (United States)

Author keywords

Flexible beam; Force tracking; Laser free atomic force microscopy (AFM); Nonlinear control

Indexed keywords

ATOMIC PHYSICS; ATOMS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTRIC WIRE; FLEXIBLE STRUCTURES; LASERS; MANIPULATORS; MICROMANIPULATORS; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PHOTORESISTS; SCANNING PROBE MICROSCOPY; SENSORS; SYSTEM STABILITY;

ATOMIC FORCES; CONTROLLER DEVELOPMENTS; DERIVATIVE CONTROLLERS; FLEXIBLE BEAM; FORCE SENSING; FORCE SENSORS; FORCE TRACKING; FORCE VARIATIONS; HIGH RESOLUTIONS; IMAGING RESOLUTIONS; MASS SPRINGS; MEMS DEVICES; MICRO CANTILEVERS; MODELING FRAMEWORKS; NANOMANIPULATION; NANOSCALE; NONLINEAR CONTROL; NUMERICAL SIMULATIONS; PARAMETER SYSTEMS; PERFORMANCE CHARACTERISTICS; PERTURBATION ESTIMATIONS; PIEZORESISTIVE; PIEZORESISTIVE LAYERS; ROBUST CONTROLLERS; ROBUST NONLINEAR CONTROLS; SLIDING MODES; TRACKING PROBLEMS; UNMODELED DYNAMICS;

ATOMIC FORCE MICROSCOPY;

EID: 56349134593     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2008.2002737     Document Type: Article

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