A new modeling and control framework for MEMS characterization utilizing piezoresistive microcantilever sensors

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 3761-3766

  Saeidpourazar, Reza ^a   Jalili, Nader ^a  

^a AMRL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPUTER SIMULATION; FORCE MEASUREMENT; IMAGING TECHNIQUES; INVERSE PROBLEMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; PHOTORESISTS; SCANNING PROBE MICROSCOPY; SENSORS;

BASE MOTION; COMPREHENSIVE MODELING; CON TROL ALGORITHMS; CONTROLLER DESIGNS; FORCE SENSING; INVERSE MODELING; MATHEMATICAL MODELLING; MEASUREMENT REQUIREMENT; MEMS CHARACTERIZATION; MICRO-CANTILEVERS; MODELING AND CONTROL; NANO SCALING; NON-CONTACT ATOMIC FORCE MICROSCOPY; NUMERICAL SIMULATIONS; ON-LINE CONTROLS; OUTPUT VOLTAGES; PIEZORESISTIVE; PIEZORESISTIVE LAYER; PIEZORESISTIVE MICROCANTILEVER; PRECISE MODELING; SENSING APPLICATIONS; SENSOR FEEDBACK;

COMPOSITE MICROMECHANICS;

EID: 52449094697     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4587079     Document Type: Conference Paper

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