New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive

IEEE Transactions on Industrial Electronics

Volumn 50, Issue 6, 2003, Pages 1337-1339

  Zhao, Tao ^a   Liang, Yung C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Microactuation; Microelectromechanical systems (MEMS) comb drive

Indexed keywords

AIR; AMPLIFIERS (ELECTRONIC); DAMPING; ELECTRIC BREAKDOWN; ELECTRIC DRIVES; ELECTROSTATICS; EQUATIONS OF MOTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OSCILLATORS (ELECTRONIC); PHASE SHIFTERS; WAVEFORM ANALYSIS;

COMB DRIVES; MICROACTUATION;

MICROACTUATORS;

EID: 0346055413     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2003.819567     Document Type: Article

References (8)

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