Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode

IEEE Transactions on Industrial Electronics

Volumn 45, Issue 6, 1998, Pages 861-865

  Chung, Seok Whan ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

Lifetime; Micro mirror array; Optical measurement system; P i n lateral effect photodiode

Indexed keywords

ELECTROPLATING; HELIUM NEON LASERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL VARIABLES MEASUREMENT; PHOTODIODES; THRESHOLD VOLTAGE;

LITHOGRAPHY-GALVANOFURMUNG-ABFORMUNG-LIKE PROCESS; MICROMIRROR ARRAYS;

MIRRORS;

EID: 0032297017     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/41.735329     Document Type: Article

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