Modeling and optimal design of high sensitivity piezoresistive microcantilevers for biosensing applications

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 360-363

  Yang, Mo ^a   Zhang, Xuan ^a   Ozkan, Cengiz S ^a  

^a University of California Riverside   (United States)

Author keywords

Chemo mechanical stress; Finite element modeling; Piezoresistive cantilevers

Indexed keywords

CHEMOMECHANICAL STRESS; PARAMETRIC MODELING; PIEZORESISTIVE CANTILEVERS; SURFACE STRESS;

CANTILEVER BEAMS; COMPUTER SIMULATION; COMPUTER SOFTWARE; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PIEZOELECTRIC MATERIALS;

BIOSENSORS;

EID: 0347842565     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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