Cylindrical pore arrays in silicon with intermediate nano-sizes: A template for nanofabrication and multilayer applications

Electrochimica Acta

Volumn 53, Issue 22, 2008, Pages 6444-6451

  Harraz, Farid A ^a   El Sheikh, Said M ^a   Sakka, Tetsuo ^b   Ogata, Yukio H ^b  

^a CENTRAL METALLURGICAL RESEARCH AND DEVELOPMENT INSTITUTE CMRDI   (Egypt)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Electropolymerization; Nanofabrication; Nanoporous silicon; Polypyrrole nanowires; Template synthesis

Indexed keywords

ELECTROLYTES; ELECTROPOLYMERIZATION; FABRICATION; HYDROFLUORIC ACID; MULTILAYERS; NANOTECHNOLOGY; NANOWIRES; POLYPYRROLES; PORE SIZE;

ELECTROCHEMICAL MEASUREMENTS; ELECTROCHEMICAL TECHNIQUES; FORMATION MECHANISM; NANO-POROUS SILICON; POLYMER NANOFABRICATION; POLYPYRROLE NANOWIRES; SELECTIVE DISSOLUTION; TEMPLATE SYNTHESIS;

SILICON;

EID: 54249111483     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2008.04.045     Document Type: Article

References (28)

1. V. Lehmann, J. Electrochem. Soc. 140 (1993) 2836.
2. E.K. Propst, P.A. Kohl, J. Electrochem. Soc. 141 (1994) 1006.
3. A.C. Cullis, LT. Canham, P.D. Calcott, J. Appl. Phys. 82 (1997) 909.
4. V. Lehmann, Electrochemistry of Silicon, Wiley-VCH, Weinheim, 2002.
5. F.A. Harraz, T. Sakka, Y.H. Ogata, Electrochim. Acta 50 (2005) 5340.
6. T. Tsuboi, T. Sakka, Y.H. Ogata, J. Appl. Phys. 83 (1998) 4501.
7. A. Vyatkin, V. Starkov, V. Tzeitlin, H. Presting, J. Konle, U. König, J. Electrochem. Soc. 149 (2002) G70.
8. F.A. Harraz, K. Kamada, T. Kobayashi, T. Sakka, Y.H. Ogata, J. Electrochem. Soc. 152 (2005) C213.
9. V. Lehmann, R. Stengl, A. Luigart, Mater. Sci. Eng. B69-70 (2000) 11.
10. H. Ohji, S. Izuo, P.J. French, K. Tsutsumi, Sens. Actuators A92 (2001) 384.
11. P. Kleimann, J. Linnros, S. Petersson, Mater. Sci. Eng. B69-70 (2000) 29.
12. M. Christophersen, J. Carstensen, A. Feuerhake, h. Foil, Mater. Sci. Eng. B69-70 (2000) 194.
13. D. Hamm, T. Sakka, Y.H. Ogata, Phys. Stat. Sol. (c) 2 (2005) 3334.
14. A. Janshoff, K.-P.S. Dancil, C. Steinern, D.P. Greiner, V.S.-Y. Lin, C. Gurtner, K. Motesharei, M.J. Sailor, M.R. Ghadiri, J. Am. Chem. Soc. 120 (1998) 12108.
15. M. Christophersen,J. Carstensen, H. Foil, Phys. Stat. Sol. (a) 182 (2000) 45.
16. H. Ouyang, M. Christophersen, P.M. Fauchet, Phys. Stat. Sol. (a) 202 (2005) 1396.
17. Y.H. Ogata, A. Koyama, F.A. Harraz, M.S. Salem, T. Sakka, Electrochemistry 75 (2007) 270.
18. S.M. Sze, Semiconductor Devices: Physics and Technology, second ed., Wiley and Sons. Inc., New York, 2002, p. 428.
19. V. Lehmann, Electrochemistry of Silicon, Wiley-VCH, Weinheim, 2002, p. 118.
20. M.S. Salem, M.J. Sailor, F.A. Harraz, T. Sakka, Y.H. Ogata, J.Appl. Phys. 100 (2006) 083520.
21. M.S. Salem, M.J. Sailor, F.A. Harraz, T. Sakka, Y.H. Ogata, Phys. Stat. Sol. (c) 4 (2007)2073.
22. M.S. Salem, M.J. Sailor, K. Fukami, T. Sakka, Y.H. Ogata, Phys. Stat. Sol. (c), submitted (presented at PSST-2008).
23. T.W. Lewis, S.E. Moulton, G.M. Spinks, G.G. Wallace, Synth. Met. 85 (1997) 1419.
24. J.D. Moreno, M.L. Marcos, F. Agulló-Rueda, R. Guerrero-Lemus, RJ. Martín-Palma, J.M. Martînez-Duart, J. González-Velasco, Thin Solid Films 348 (1999) 152.
25. R.M.L Van de Leur, A. Van der Waal, Synth. Met. 102 (1999) 1330.
26. G.S. Akundy, J.O. Iroh, Polymer 42 (2001) 9665.
27. V. Vrkoslav, I. Jelinek, G. Broncova, V. Kral, J. Dian, Mater. Sci. Eng. C 26 (2006) 1072.
28. F.A. Harraz, M.S. Salem, T. Sakka, Y.H. Ogata, Electrochim. Acta 53 (2008) 3734.