Sensing of chemical vapor using a porous multilayer prepared from lightly doped silicon

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 4, Issue 6, 2007, Pages 2073-2077

  Salem, M S ^a   Sailor, M J ^b   Harraz, F A ^a,c   Sakka, T ^a   Ogata, Y H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c CENTRAL METALLURGICAL RESEARCH AND DEVELOPMENT INSTITUTE CMRDI   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED SURFACE; AVERAGE VOLUME; BRUGGEMAN EFFECTIVE MEDIUM APPROXIMATION; CAPILLARY CONDENSATION; CHARACTERISTIC MATRICES; CHARACTERISTIC PEAKS; CHEMICAL VAPORS; DOPED SILICON; ETHANOL MOLECULES; ETHANOL VAPORS; MULTI LAYERING; PARTIAL FILLING; RED SHIFTING; ROOM TEMPERATURES; RUGATE FILTERS; THEORETICAL CALCULATIONS;

AIR FILTERS; ASTROPHYSICS; CEMENTS; CHEMICAL VAPOR DEPOSITION; ELECTROCHEMICAL OXIDATION; ETHANOL; NONMETALS; SENSITIVITY ANALYSIS; SILICON; SURFACE ANALYSIS; VAPORS; WAVE FILTERS;

POROUS SILICON;

EID: 43049150714     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200674374     Document Type: Conference Paper

References (13)

1. B. G. Bovard, Appl. Opt. 32, 5427 (1993).
2. G. Vincent, Appl. Phys. Lett. 64, 2367 (1994).
3. R. Jamie and M. J. Sailor, Appl. Phys. Sci. 100, 10607 (2003).
4. D. Hamm, J. Sassano, T. Sakka, and Y. H. Ogata, J. Electrochem. Soc. 149, C331 (2002).
5. W. Theiss, The Use of Effective Medium Theories in Optical Spectroscopy, in: Festkörperprobleme/Advances in Solid State Physics 33, edited by R. Helbig (Vieweg, Braunschweig, 1993).
6. M. Born and E. Wolf, Principle of Optics (Pergamon, Oxford, 1980).
7. K. Kaminska, T. Brown, G. Beydaghyan, and K. Robbie, Appl. Opt. 42, 4212 (2003).
8. M. Thönissen, M. G. Berger, S. Billat, R. Arens-Fischer, M. Krüger, H. Lüth, W. Theiss, S. Hilbrich, P. Grosse, G. Lerondel, and U. Frotscher, Thin Solid Films 297, 92 (1997).
9. S. J. Gregg and K. S. W. Sing, Adsorption, Surface Area and Porosity, 2nd ed. (Academic Press, London, 1982), p. 112.
10. C. Wongmanerod, S. Zangooie, and H. Arwin, Appl. Surf. Sci. 172, 117 (2001).
11. S. Zangooie, R. Janson, and H. Arwin, J. Appl. Phys. 86, 850 (1999).
12. E. P. Barret, L. G. Joyner, and P. P. Halenda, J. Am. Chem. Soc. 73, 373 (1951).
13. A. Bsiesy, F. Gaspard, R. Herino, M. Leigeon, F. Muller, and J. C. Oberlin, J. Electrochem. Soc. 138, 3450 (1991).