Specific deposition of copper onto porous silicon

Physica Status Solidi C: Conferences

Volumn 2, Issue 9, 2005, Pages 3334-3338

  Hamm, D ^a   Sakka, T ^a   Ogata, Y H ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; OXIDATION; OXYGEN; POROUS SILICON;

IMMERSION PLATING; IMMERSION TIME; POROUS LAYERS;

COPPER;

EID: 27344446674     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200461157     Document Type: Conference Paper

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