Integration of high-performance RF passive modules (MIM capacitors and inductors) in advanced BEOL

Microelectronic Engineering

Volumn 85, Issue 10, 2008, Pages 1940-1946

  Farcy, A ^a   Carpentier, J F ^a   Thomas, M ^a   Torres, J ^a   Ancey, P ^a  

^a STMICROELECTRONICS   (France)

Author keywords

Inductors; Integration; MIM capacitors; Passive components; RF technology

Indexed keywords

CAPACITANCE; CAPACITORS; COPPER; DIELECTRIC DEVICES; ELECTRIC EQUIPMENT; ENERGY STORAGE; MIM DEVICES; TECHNOLOGICAL FORECASTING;

CIRCUIT PERFORMANCES; CMOS TECHNOLOGIES; DOWN-SCALING; INDUCTORS; INTEGRATION; KEY ELEMENTS; MIM CAPACITORS; PASSIVE COMPONENTS; RF TECHNOLOGY; SYSTEM-ON-CHIPS; TECHNOLOGICAL INNOVATIONS;

TECHNOLOGY;

EID: 52149104046     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.03.017     Document Type: Article

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