Application of on-chip MIM decoupling capacitor for 90nm SOI microprocessor

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 72-75

  Roberts, D ^a   Johnstone, W ^a   Sanchez, H ^a   Mandhana, Om ^a   Spilo, D ^a   Hayden, J ^a   Travis, E ^a   Melnick, B ^a   Celik, M ^a   Min, Byoung Woon ^a   Edgerton, J ^a   Raymond, M ^a   Luckowski, E ^a   Happ, C ^a   Martinez, A ^a   Wilson, B ^a   Leung, Pak ^a   Garnett, T ^a   Goedeke, D ^a   Remmel, T ^a   Ramakrishna, K ^a   White Jr , B E ^a   more..

^a FREESCALE SEMICONDUCTOR INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL INSULATOR METAL (MIM) CAPACITORS; SUPPLY GRID VOLTAGE TRANSIENTS;

ELECTRIC POTENTIAL; ENERGY UTILIZATION; MICROPROCESSOR CHIPS; MIM DEVICES; SILICON ON INSULATOR TECHNOLOGY;

CAPACITORS;

EID: 33847737364     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. H. Hu, et al., IEDM Tech Dig., 2003.
2. Y.L Tu, et al., VLSI Tech Dig., 2003.
3. M. Armacost, et al., IEDM Tech Dig., 2000.
4. P. Zurcher, et al., IEDM Tech Dig., 2000.
5. S. Zou, et al., ISPD Proceedings, 2001.