Above IC integrated SrTiO3 high K MIM capacitors

ESSDERC 2006 - Proceedings of the 36th European Solid-State Device Research Conference

Volumn 2006-January, Issue , 2006, Pages 186-189

  Defaÿ, Emmanuel ^a   Wolozan, David ^a   Garrec, Pierre ^a   André, Bernard ^a   Ulmer, Laurent ^a   Aïd, Marc ^a   Blanc, Jean Pierre ^b   Serret, Emmanuelle ^b   Delpech, Philippe ^b   Giraudin, Jean Christophe ^b   Guillan, Julie ^b   Pellissier, Denis ^b   Ancey, Pascal ^b  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BISMUTH COMPOUNDS; INTEGRATED CIRCUITS; MIM DEVICES; STRONTIUM TITANATES; TIMING CIRCUITS;

ABOVE IC; BICMOS INTEGRATED CIRCUITS; COUPLING CAPACITOR; HIGH- K; MIM CAPACITORS;

TITANIUM COMPOUNDS;

EID: 56749124569     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/essder.2006.307669     Document Type: Conference Paper

References (12)

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