Development of embedded three-dimensional 35-nF/mm2 MIM capacitor and BiCMOS circuits characterization

IEEE Journal of Solid-State Circuits

Volumn 42, Issue 9, 2007, Pages 1842-1849

  Giraudin, Jean Christophe ^b   Badets, Franck ^b   Blanc, Jean Pierre ^b   Chataigner, Emmanuel ^b   Chappaz, Cédrick ^b   Regolini, Jorge Luis ^b   Delpech, Philippe ^a,b  

^a IEEE

^b STMICROELECTRONICS   (France)

Author keywords

BiCMOS integrated circuits; Capacitors; Filters; Frequency synthesizers; MIM devices; Phase locked loops; Voltage controlled oscillators

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; ELECTRIC FILTERS; PHASE LOCKED LOOPS; VARIABLE FREQUENCY OSCILLATORS;

BICMOS INTEGRATED CIRCUITS; STATISTICAL MEASUREMENTS;

CAPACITORS;

EID: 34548269486     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2007.900787     Document Type: Conference Paper

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