SCOPUS 정보 검색 플랫폼

Volumn 23, Issue 4, 2002, Pages 191-193

Investigation of PECVD dielectrics for nondispersive metal-insulator-metal capacitors

(5) Van Huylenbroeck, S a Decoutere, S a Venegas, R a Jenei, S a,b Winderickx, G a

Author keywords

Dispersion of capacitors; Frequency stability of capacitors; Linear capacitors; Matching of capacitors; Metal insulator metal (MIM) devices; PECVD dielectric materials

Indexed keywords

DEGRADATION; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; HYSTERESIS; LEAKAGE CURRENTS; MIM DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL EFFECTS;

CAPACITOR LINEARITY; NONDISPERSIVE CAPACITORS; PRECISION ANALOG CIRCUITS; VOLTAGE LINEARITY;

CAPACITORS;

EID: 0036540911 PISSN: 07413106 EISSN: None Source Type: Journal
DOI: 10.1109/55.992835 Document Type: Article

Times cited : (49)

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