An inductor with taper stacked metals on silicon chip

Asia-Pacific Microwave Conference Proceedings, APMC

Volumn 3, Issue , 2006, Pages 1543-1546

  Lee, Sheng Yuan ^a  

^a Manufacturing and Product Engineering Division   (Taiwan)

Author keywords

CMOS integrated circuits; Inductors; Q factor; Semiconductor devices

Indexed keywords

EDDY CURRENTS; ELECTROMAGNETISM; INDUCED CURRENTS; LITHOGRAPHY; MAGNETISM; METALS; MICROWAVES; NONMETALS; SILICON;

ASIA PACIFIC; CONDUCTOR LOSSES; CONFERENCE PROCEEDINGS; ELECTROMAGNETIC (EM) SIMULATIONS; EQUIVALENT CIRCUIT MODEL (ECM); INDUCED EDDY CURRENTS; METAL STRUCTURES; PARASITIC CAPACITANCES; SILICON (111) SUBSTRATES; SILICON CHIPS;

STRUCTURAL METALS;

EID: 44949209516     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMC.2006.4429700     Document Type: Conference Paper

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