Nanocrystalline ZrO2 thin films on silicon fabricated by pulsed-pressure metalorganic chemical vapor deposition (PP-MOCVD)

Journal of Materials Research

Volumn 23, Issue 8, 2008, Pages 2202-2211

  Ramirez, L ^a   Mecartney, M L ^a   Krumdieck, S P ^b  

^a University of California at Irvine   (United States)

^b UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

NANO-CRYSTALLINE;

ZIRCONIUM ALLOYS;

EID: 50449100344     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0267     Document Type: Article

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