Synthesis, structure, microstructure and mechanical characteristics of MOCVD deposited zirconia films

Applied Surface Science

Volumn 253, Issue 10, 2007, Pages 4626-4640

  Bernard, O ^a   Huntz, A M ^a   Andrieux, M ^a   Seiler, W ^b   Ji, V ^b   Poissonnet, S ^c  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b CNRS   (France)

^c SERVICE DE RECHERCHES DE MÉTALLURGIE PHYSIQUE   (France)

Author keywords

Mechanical properties; Micro and nano indentation; Monoclinic phase; Tetragonal phase; Thin films; Zirconia

Indexed keywords

INDENTATION; MECHANICAL PROPERTIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION; ZIRCONIUM COMPOUNDS;

MICRO-INDENTATION; MONOCLINIC PHASE; NANO-INDENTATION; TETRAGONAL PHASE;

THIN FILMS;

EID: 33847010199     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.025     Document Type: Article

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