Conversion efficiency of alkoxide precursor to oxide films grown by an ultrasonic-assisted, pulsed liquid injection, metalorganic chemical vapor deposition (pulsed-CVD) process

Journal of the American Ceramic Society

Volumn 82, Issue 6, 1999, Pages 1605-1607

  Krumdieck, Susan ^a   Raj, Rishi ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; NICKEL ALLOYS; POLYCRYSTALLINE MATERIALS; PYROLYSIS; TITANIUM DIOXIDE; ZIRCONIA;

CONVERSION EFFICIENCY; GRAIN MORPHOLOGY; PULSED LIQUID INJECTION; TITANIUM ISOPROPOXIDE; ULTRASONIC ASSISTED DEPOSITION;

OXIDES;

EID: 0032652998     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1999.tb01968.x     Document Type: Article

References (13)

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