-
1
-
-
50049132418
-
A Review of Some Current Research in Micro-Electro-Mechanical Systems (MEMS) with Defense Applications
-
Government of Australia, Department of Defense, DSTO-GD-0316
-
White, A., "A Review of Some Current Research in Micro-Electro-Mechanical Systems (MEMS) with Defense Applications", Scientific and Technical Reports, Government of Australia, Department of Defense, 2002, DSTO-GD-0316.
-
(2002)
Scientific and Technical Reports
-
-
White, A.1
-
2
-
-
0003532560
-
-
Kluwer Academic Publishers, ISBN-0-7923-7246-8
-
Senturia, S.D., Microsystem Design. Kluwer Academic Publishers 2001. ISBN-0-7923-7246-8.
-
(2001)
Microsystem Design
-
-
Senturia, S.D.1
-
3
-
-
50049096786
-
Design Automation for MEMS/MST
-
Munich, Germany
-
Van Kuijk, J., Schropfer, S.D. and DaSilva, M., "Design Automation for MEMS/MST", Design, Automation and Test in Europe Conference & Exhibition, Munich, Germany, 2005.
-
(2005)
Design, Automation and Test in Europe Conference & Exhibition
-
-
Van Kuijk, J.1
Schropfer, S.D.2
DaSilva, M.3
-
4
-
-
3142705953
-
Review: Automatic Model Reduction for Transient Simulation of MEMS-based Devices
-
Rudnyi, E.B., Korvink, J.G., "Review: Automatic Model Reduction for Transient Simulation of MEMS-based Devices", Sensors Update vol. 11, p. 3-33, 2002.
-
(2002)
Sensors Update
, vol.11
, pp. 3-33
-
-
Rudnyi, E.B.1
Korvink, J.G.2
-
5
-
-
35248858373
-
System-Level Synthesis of MEMS via Genetic Programming and Bond Graphs
-
Fan, Z., Seo, K., Hu, J., Rosenberg, R. C., Goodman, E. D. , "System-Level Synthesis of MEMS via Genetic Programming and Bond Graphs", Proceedings of the 2003 Genetic and Evolutionary Computation Conference, pp.2058-2071, 2003.
-
(2003)
Proceedings of the 2003 Genetic and Evolutionary Computation Conference
, pp. 2058-2071
-
-
Fan, Z.1
Seo, K.2
Hu, J.3
Rosenberg, R.C.4
Goodman, E.D.5
-
6
-
-
50049100166
-
TheMathWorks, Inc
-
MathWorks Web, Natick, MA
-
MathWorks Web Page, http://www.matlab.com/, TheMathWorks, Inc., 24 Prime Park Way, Natick, MA 01760-1500.
-
Prime Park Way
, vol.24
, pp. 01760-11500
-
-
-
7
-
-
0004051692
-
Simulation of Microelectromechanical Systems
-
Ph.D. Thesis, Department of Electrical Engineering and Computer Science, University of California at Berkeley
-
Fedder, G. K., "Simulation of Microelectromechanical Systems", Ph.D. Thesis, Department of Electrical Engineering and Computer Science, University of California at Berkeley, 1994.
-
(1994)
-
-
Fedder, G.K.1
-
8
-
-
0024920223
-
Behavioral Modelling of Analog Blocks using the SABER Simulator
-
August
-
Getreu, I., "Behavioral Modelling of Analog Blocks using the SABER Simulator", Proceedings on Microwave Circuits and Systems, pp 977-980, August 1989.
-
(1989)
Proceedings on Microwave Circuits and Systems
, pp. 977-980
-
-
Getreu, I.1
-
9
-
-
50049107642
-
Cadence Design Systems, Inc
-
San Jose, CA 95134
-
Cadence Web Page, http://www.cadence.com, Cadence Design Systems, Inc., 555 River Oaks Parkway, San Jose, CA 95134.
-
555 River Oaks Parkway
-
-
-
10
-
-
0003369344
-
SPICE2: A Computer Program to Simulate Semiconductor Circuits
-
University of California, Berkeley
-
Nagel, L. W., "SPICE2: A Computer Program to Simulate Semiconductor Circuits," ERL-M520, University of California, Berkeley, 1975.
-
(1975)
ERL-M520
-
-
Nagel, L.W.1
-
11
-
-
0030396701
-
Multimode Digital Control of a Suspended Polysilicon Microstructure
-
Fedder, G. K. and Howe, R. T., "Multimode Digital Control of a Suspended Polysilicon Microstructure", Journal of Microelectromechanical Systems, pp 283-297, vol 5, No. 4, 1996.
-
(1996)
Journal of Microelectromechanical Systems
, vol.5
, Issue.4
, pp. 283-297
-
-
Fedder, G.K.1
Howe, R.T.2
-
12
-
-
50049089129
-
-
SoftMEMS Web Page, http://www.softmems.com/, SoftMEMS, 14109 Capri Dr, Los Gatos, CA 95032.
-
SoftMEMS Web Page, http://www.softmems.com/, SoftMEMS, 14109 Capri Dr, Los Gatos, CA 95032.
-
-
-
-
13
-
-
50049109517
-
-
Coventor Web Page, http://www.coventor.com/, Coventor, Inc., 4000 CentreGreen Way, Suite 190, Cary, NC 27513.
-
Coventor Web Page, http://www.coventor.com/, Coventor, Inc., 4000 CentreGreen Way, Suite 190, Cary, NC 27513.
-
-
-
-
14
-
-
0030349222
-
Design Techniques for Minimizing Manufacturing Variations in Surface Micromachined Accelerometers
-
Bart, S.F. and Samuels, H.R., "Design Techniques for Minimizing Manufacturing Variations in Surface Micromachined Accelerometers", ASME WAM, DSC, vol. 59, pp. 427-433, 1996.
-
(1996)
ASME WAM, DSC
, vol.59
, pp. 427-433
-
-
Bart, S.F.1
Samuels, H.R.2
-
16
-
-
0031707919
-
AutoMM: Automatic Generation of Dynamic Macromodels for MEMS Devices
-
Swart, N. R., Bart, S.F., Zaman, M.H., Mariappan, M., Gilbert, J.R., and Murphy, D., "AutoMM: Automatic Generation of Dynamic Macromodels for MEMS Devices", IEEE Proceedings of the Eleventh Annual International Workshop on Microelectromechanicalsystems, 1998. pp. 178-183.
-
(1998)
IEEE Proceedings of the Eleventh Annual International Workshop on Microelectromechanicalsystems
, pp. 178-183
-
-
Swart, N.R.1
Bart, S.F.2
Zaman, M.H.3
Mariappan, M.4
Gilbert, J.R.5
Murphy, D.6
-
17
-
-
0033077588
-
A Coordinate-Transformed Arnoldi Algorithm for Generating Guaranteed Stable Reduced-Order Models of RLC Circuits
-
19 ref, pp
-
Silveira, L. M. Kamon, M., Elfadel, I. and White, J., "A Coordinate-Transformed Arnoldi Algorithm for Generating Guaranteed Stable Reduced-Order Models of RLC Circuits", Computer Methods in Applied Mechanics and Engineering, vol. 169, no 3-4 (19 ref.), pp. 377-389, 1999.
-
(1999)
Computer Methods in Applied Mechanics and Engineering
, vol.169
, Issue.3-4
, pp. 377-389
-
-
Silveira, L.M.1
Kamon, M.2
Elfadel, I.3
White, J.4
-
18
-
-
2342490774
-
Automatic Generation of Compact Electro-thermal Models for Semiconductor Devices
-
Bechtold T., Rudnyi, E.B. and Korvink, J.G., "Automatic Generation of Compact Electro-thermal Models for Semiconductor Devices", IEICE Transactions on Electronics, vol. 86, pp. 459-65, 2003.
-
(2003)
IEICE Transactions on Electronics
, vol.86
, pp. 459-465
-
-
Bechtold, T.1
Rudnyi, E.B.2
Korvink, J.G.3
-
20
-
-
0032303777
-
Automatic model order reduction of a microdevice using the Arnoldi approach
-
Wang, F., and White, "Automatic model order reduction of a microdevice using the Arnoldi approach", ASME IMECE'98 DSC, vol 66 pp 527-30, 1998.
-
(1998)
ASME IMECE'98 DSC
, vol.66
, pp. 527-530
-
-
Wang, F.1
White2
-
21
-
-
2342517503
-
Extraction of heat-transfer macromodels for MEMS devices
-
Yang Y.J. and Yu, C.C., "Extraction of heat-transfer macromodels for MEMS devices", Journal of Micromechanics and Microengineering, vol. 14, No 4, pp. 587-596, 2004.
-
(2004)
Journal of Micromechanics and Microengineering
, vol.14
, Issue.4
, pp. 587-596
-
-
Yang, Y.J.1
Yu, C.C.2
-
22
-
-
0034998906
-
Modeling Gas Damping and Spring Phenomena in MEMS with Frequency Dependent Macro-Models
-
Yang, Y-J., Kamon, M., Rabinovich, V.L., Ghaddar, C., Deshpande, M., Greiner, K., and Gilbert, J.R., "Modeling Gas Damping and Spring Phenomena in MEMS with Frequency Dependent Macro-Models", Proceedingds of the 14th IEEE International Conference on MEMS, pp 365-368, 2001.
-
(2001)
Proceedingds of the 14th IEEE International Conference on MEMS
, pp. 365-368
-
-
Yang, Y.-J.1
Kamon, M.2
Rabinovich, V.L.3
Ghaddar, C.4
Deshpande, M.5
Greiner, K.6
Gilbert, J.R.7
-
23
-
-
0035212532
-
A Trajectory Piecewise-Linear Approach to Model Order Reduction and Fast Simulation of Nonlinear Circuit and Micromachined Devices
-
Rewienski, M., and White, J., "A Trajectory Piecewise-Linear Approach to Model Order Reduction and Fast Simulation of Nonlinear Circuit and Micromachined Devices", Proceedings of Computer-Aided Design, pp. 252-257, 2001.
-
(2001)
Proceedings of Computer-Aided Design
, pp. 252-257
-
-
Rewienski, M.1
White, J.2
-
24
-
-
3142702295
-
Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Micromachined Devices Using an Aggregated Projection Basis
-
Rewienski, M., and White, J., "Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Micromachined Devices Using an Aggregated Projection Basis", Proceedings of Modeling and Simulation of Microsystems, pp. 128-131, 2002.
-
(2002)
Proceedings of Modeling and Simulation of Microsystems
, pp. 128-131
-
-
Rewienski, M.1
White, J.2
-
25
-
-
0030654981
-
Low-Order Models for Fast Dynamical Simulation of MEMS Microstructures
-
Hung, E., Yang, Y-J., and Senturia, S.D., "Low-Order Models for Fast Dynamical Simulation of MEMS Microstructures", Proceedings of Transducers'97, pp. 1101-1104, 1997.
-
(1997)
Proceedings of Transducers'97
, pp. 1101-1104
-
-
Hung, E.1
Yang, Y.-J.2
Senturia, S.D.3
-
26
-
-
0032031194
-
An Efficient Method Of Solving The Navier-Stokes Equations For Flow Control
-
Park, H. M. and Lee, M.W., "An Efficient Method Of Solving The Navier-Stokes Equations For Flow Control", International Journal for Numerical Methods in Engineering, vol. 41, No 6, pp. 1133-1151, 1998.
-
(1998)
International Journal for Numerical Methods in Engineering
, vol.41
, Issue.6
, pp. 1133-1151
-
-
Park, H.M.1
Lee, M.W.2
-
27
-
-
4243118612
-
Macromodeling of Coupled-Domain MEMS Devices with Electrostatic and Electro Thermal Effects
-
Yang, Y.J., Cheng, S.Y. and Shen, K.Y., "Macromodeling of Coupled-Domain MEMS Devices with Electrostatic and Electro Thermal Effects", Journal of Micromechanics and Microengineering, vol. 14, No8, pp. 1190-1196, 2004.
-
(2004)
Journal of Micromechanics and Microengineering
, vol.14
, Issue.NO8
, pp. 1190-1196
-
-
Yang, Y.J.1
Cheng, S.Y.2
Shen, K.Y.3
-
28
-
-
0009599411
-
-
Ed, J.G. Webster
-
Antoulas, A.C., Approximation of Linear Dynamical Systems, Wiley Encyclopedia of Electrical and Electronics Engineering, (Ed.: J.G. Webster), 11, pp. 403-422, 1999.
-
(1999)
Approximation of Linear Dynamical Systems, Wiley Encyclopedia of Electrical and Electronics Engineering
, vol.11
, pp. 403-422
-
-
Antoulas, A.C.1
-
30
-
-
50049122754
-
-
Antonsson, E. K. & Cagan, J, eds, Cambridge University Press, pp
-
Antonsson, E. K., Microsystem Design Synthesis, Chapter 5 of Formal Engineering Design Synthesis, Antonsson, E. K. & Cagan, J., (eds), Cambridge University Press, pp. 126-169, 2001.
-
(2001)
Microsystem Design Synthesis, Chapter 5 of Formal Engineering Design Synthesis
, pp. 126-169
-
-
Antonsson, E.K.1
-
31
-
-
0032594977
-
Generating Efficient Dynamical Models for Microelectromechanical Systems from a Few Finite-Element Simulation Runs
-
Hung, E., and Senturia, S.D., "Generating Efficient Dynamical Models for Microelectromechanical Systems from a Few Finite-Element Simulation Runs", Journal of Microelectromechanical Systems, vol. 8, no3, pp. 280-289, 1999.
-
(1999)
Journal of Microelectromechanical Systems
, vol.8
, Issue.NO3
, pp. 280-289
-
-
Hung, E.1
Senturia, S.D.2
-
32
-
-
0032655108
-
Automated Optimal Synthesis of Microaccelerometers
-
Mukherjee, T., Zhou, Y., Fedder, G. K., "Automated Optimal Synthesis of Microaccelerometers", Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 326-331, 1999.
-
(1999)
Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99)
, pp. 326-331
-
-
Mukherjee, T.1
Zhou, Y.2
Fedder, G.K.3
-
33
-
-
25144510811
-
Evolutionary Synthesis of MEMS Devices,
-
Doctoral Dissertation, Department of Mechanical Engineering, University of California at Berkeley
-
Kamalian, R., "Evolutionary Synthesis of MEMS Devices," Doctoral Dissertation, Department of Mechanical Engineering, University of California at Berkeley, 2004.
-
(2004)
-
-
Kamalian, R.1
-
34
-
-
14044251602
-
The Role of Constraints and Human Interaction in Evolving MEMS Designs: Microresonator Case Study
-
CD ROM, ISBN, I710CD
-
Kamalian, R., Agogino, A.M., and Takagi, H., "The Role of Constraints and Human Interaction in Evolving MEMS Designs: Microresonator Case Study", Proceedings of DETC/DAC, 2004 Design Engineering Technical Conference, Design Automation Track, CD ROM, ISBN # I710CD, 2004.
-
(2004)
Proceedings of DETC/DAC, 2004 Design Engineering Technical Conference, Design Automation Track
-
-
Kamalian, R.1
Agogino, A.M.2
Takagi, H.3
-
35
-
-
14044278264
-
Simulation and Synthesis of MicroElectronicMechanical Systems
-
PhD Thesis, UC Berkeley, Berkeley, CA
-
Zhou, N., "Simulation and Synthesis of MicroElectronicMechanical Systems" PhD Thesis, UC Berkeley, Berkeley, CA, 8, 2002.
-
(2002)
, pp. 8
-
-
Zhou, N.1
-
36
-
-
0036977405
-
Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS)
-
Zhou, N., Agogino, A. M., and Pister, K. S., "Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS)", CD-ROM Proceedings of ASME Design Automation Conference, 2002.
-
(2002)
CD-ROM Proceedings of ASME Design Automation Conference
-
-
Zhou, N.1
Agogino, A.M.2
Pister, K.S.3
-
37
-
-
0012933505
-
Evolutionary Synthesis of MEMS MicroElectronicMechanical Systems Design
-
ASME Press, pp
-
Zhou, N., Zhu, B., Agogino, A. M. and Pister, K. S. J., "Evolutionary Synthesis of MEMS MicroElectronicMechanical Systems Design", Proceedings of the Artificial Neural Networks in Engineering (ANNIE2001), 11, ASME Press, pp.197-202, 2001.
-
(2001)
Proceedings of the Artificial Neural Networks in Engineering (ANNIE2001)
, vol.11
, pp. 197-202
-
-
Zhou, N.1
Zhu, B.2
Agogino, A.M.3
Pister, K.S.J.4
-
38
-
-
50049096524
-
-
Campbell, M. I., An Automated Approach to Generating Novel MEMS Accelerometer Configurations, Texas-Area MEMS Workshop, Oral presentation, 2001.
-
Campbell, M. I., "An Automated Approach to Generating Novel MEMS Accelerometer Configurations," Texas-Area MEMS Workshop, Oral presentation, 2001.
-
-
-
-
39
-
-
0034866613
-
-
Juneidi, Z., Torki, K., Charlot, B., and Courtois, B., MEMS Synthesis and Optimization, In: Design, Test, Integration, and Packaging of MEMS/MOEMS, Coutois, B. etal. (eds), SPIE, 4408, pp. 159-164, 2001.
-
Juneidi, Z., Torki, K., Charlot, B., and Courtois, B., "MEMS Synthesis and Optimization," In: Design, Test, Integration, and Packaging of MEMS/MOEMS, Coutois, B. etal. (eds), SPIE, 4408, pp. 159-164, 2001.
-
-
-
-
40
-
-
0036851102
-
Global Optimization and Design for Microelectromechanical Systems Devices Based on Simulated Annealing
-
Ongkodjodjo, A. and Tay, F.E.H., "Global Optimization and Design for Microelectromechanical Systems Devices Based on Simulated Annealing", Journal of Micromechanics and Microengineering, pp. 878-897, 2002.
-
(2002)
Journal of Micromechanics and Microengineering
, pp. 878-897
-
-
Ongkodjodjo, A.1
Tay, F.E.H.2
-
41
-
-
50049123951
-
-
http://www.intellisensesoftware.com/
-
-
-
-
42
-
-
0033361574
-
Design Automation of MEMS Systems Using Behavioral Modeling
-
Gibson, D., Purdy, C., Hare, A., and Beyette F. Jr., "Design Automation of MEMS Systems Using Behavioral Modeling", Proceedings of the IEEE Great Lakes Symposium on VLSI, pp. 266-269, 1999.
-
(1999)
Proceedings of the IEEE Great Lakes Symposium on VLSI
, pp. 266-269
-
-
Gibson, D.1
Purdy, C.2
Hare, A.3
Beyette Jr., F.4
-
43
-
-
14044260098
-
-
Deng, Y.M. and Lu, W.F., A Conceptual Design Synthesis Framework for Micro-Electro-Mechanical Systems (MEMS), In Proceedings of the ASME Design Engineering Technical Conference, #DETC2004-57235, 2004.
-
Deng, Y.M. and Lu, W.F., "A Conceptual Design Synthesis Framework for Micro-Electro-Mechanical Systems (MEMS)", In Proceedings of the ASME Design Engineering Technical Conference, #DETC2004-57235, 2004.
-
-
-
-
44
-
-
33751350015
-
A Multicriteria System Based Method for Simulation-Driven Design Synthesis
-
Bolognini, F., Shea, K, Seshia, A., Vale, C.W., "A Multicriteria System Based Method for Simulation-Driven Design Synthesis", ASME 2006 International Design Engineering Technical Conferences, 2006.
-
(2006)
ASME 2006 International Design Engineering Technical Conferences
-
-
Bolognini, F.1
Shea, K.2
Seshia, A.3
Vale, C.W.4
-
48
-
-
50049093589
-
SUPREM-IV.GS. Two Dimensional Process Simulation for Silicon and Gallium, Arsenide
-
94305, http
-
Hansen, S., and Deal, M., "SUPREM-IV.GS. Two Dimensional Process Simulation for Silicon and Gallium, Arsenide", Integrated Circuits Laboratory, Stanford University, Stanford, California 94305, http://wwwtcad.stanford.edu/tcad/programs/suprem-IV.GS/Book.html, 1993.
-
(1993)
Integrated Circuits Laboratory, Stanford University, Stanford, California
-
-
Hansen, S.1
Deal, M.2
-
49
-
-
50049117023
-
-
http://www.iue.tuwien.ac.at/
-
-
-
-
51
-
-
50049134411
-
-
http://www.siborg.ca/
-
-
-
-
52
-
-
50049130264
-
-
http://mass.micro.uiuc.edu/research/completed/aces/pages/home.html
-
-
-
-
53
-
-
30944468782
-
Accurate and Robust Geometric Modeling for Simulation Of IC and MEMS Fabrication Processes
-
Tushar, U., "Accurate and Robust Geometric Modeling for Simulation Of IC and MEMS Fabrication Processes", Proceedings of the 2005 ACM Symposium on Solid and Physical Modeling, pp. 257 - 266, 2005.
-
(2005)
Proceedings of the 2005 ACM Symposium on Solid and Physical Modeling
, pp. 257-266
-
-
Tushar, U.1
-
55
-
-
0003741877
-
Mask-Layout and Process Synthesis for MEMS
-
Ma, L. and Antonsson, E. K., "Mask-Layout and Process Synthesis for MEMS", MSM2000, Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, IEEE, 2000.
-
(2000)
MSM2000, Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, IEEE
-
-
Ma, L.1
Antonsson, E.K.2
-
57
-
-
31144436826
-
Automated Surface Micro-Machining Mask Creation from a 3D Model
-
Schiek, R. L. and Schmidt, R.C, "Automated Surface Micro-Machining Mask Creation from a 3D Model", Microsystem Technologies, vol. 12, n 3, pp. 204-207, 2006.
-
(2006)
Microsystem Technologies
, vol.12
, Issue.3
, pp. 204-207
-
-
Schiek, R.L.1
Schmidt, R.C.2
-
59
-
-
0037139689
-
Development of a Geometry-Based Process Planning for Surface Micromachining
-
Cho, S., Lee, K. and Kim, T., "Development of a Geometry-Based Process Planning for Surface Micromachining", International Journal of Production Research, vol.40, No. 5, pp. 1275-1293, 2002.
-
(2002)
International Journal of Production Research
, vol.40
, Issue.5
, pp. 1275-1293
-
-
Cho, S.1
Lee, K.2
Kim, T.3
-
60
-
-
0242468674
-
Systematic Mask Synthesis for Surface Micromachined Microelectromechanical Systems
-
Ananthakrishnan, V., Sarma, R. and Ananthasuresh, G.K., "Systematic Mask Synthesis for Surface Micromachined Microelectromechanical Systems", Journal of Micromechanics and Microengineering, vol. 13, pp. 927-941, 2003.
-
(2003)
Journal of Micromechanics and Microengineering
, vol.13
, pp. 927-941
-
-
Ananthakrishnan, V.1
Sarma, R.2
Ananthasuresh, G.K.3
-
61
-
-
50049128232
-
An Evolutionary Approach For Robust Layout Synthesis of MEMS
-
accepted as a book chapter in, Springer, 26
-
Fan, Z., Wang, J., Wen, M., Achiche, S., Goodman, E and Rosenberg, R, "An Evolutionary Approach For Robust Layout Synthesis of MEMS", accepted as a book chapter in Evolutionary Computation in Dynamic and Uncertain Environment, Springer, 26 pages, 2007.
-
(2007)
Evolutionary Computation in Dynamic and Uncertain Environment
-
-
Fan, Z.1
Wang, J.2
Wen, M.3
Achiche, S.4
Goodman, E.5
Rosenberg, R.6
|