Evolutionary techniques in mems synthesis

Proceedings of the ASME Design Engineering Technical Conference

Volumn 1A-1998, Issue , 1998, Pages

  Li, Hui ^a   Antonsson, Erik K ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; GENETIC ALGORITHMS;

3D SIMULATIONS; AUTOMATIC SYNTHESIS; EVOLUTIONARY TECHNIQUES; FABRICATION SIMULATION; GLOBAL OPTIMUM; INITIAL POPULATION; MEMS SYNTHESIS; SHAPE VARIATIONS;

ITERATIVE METHODS;

EID: 80052852191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC98/MECH-5840     Document Type: Conference Paper

References (13)

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