Multimode digital control of a suspended polysilicon microstructure

Journal of Microelectromechanical Systems

Volumn 5, Issue 4, 1996, Pages 283-297

  Fedder, Gary K ^{a,b,c,d,e,f,g}   Howe, Roger T ^a,b,d,e,h,i  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^e CARNEGIE MELLON UNIVERSITY   (United States)

^f Robotics Institute

^g HEWLETT PACKARD COMPANY   (United States)

^h HARVEY MUDD COLLEGE   (United States)

ⁱ UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIGITAL CONTROL SYSTEMS; MICROMACHINING; SILICON; SIMULATION;

MULTIMODE DIGITAL CONTROL; SUSPENDED POLYSILICON MICROSTRUCTURE;

MICROSTRUCTURE;

EID: 0030396701     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.546408     Document Type: Article

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