Systematic mask synthesis for surface micromachined microelectromechanical systems

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 927-941

  Ananthakrishnan, Venkataraman ^a   Sarma, Radha ^b   Ananthasuresh, G K ^c  

^a Pathway Technologies Incorporated   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROMACHINING; SYNTHESIS (CHEMICAL); VLSI CIRCUITS;

MASK SYNTHESIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242468674     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/316     Document Type: Article

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