Automated and integrated mask generation from a CAD constructed 3D model

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 443-446

  Schiek, Richard L ^a   Schmidt, Rodney C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Design; Mask; Mems; Topology

Indexed keywords

COMPUTER AIDED DESIGN; DEPOSITION; MATHEMATICAL MODELS; TOPOLOGY;

CAD CONSTRUCTED 3D MODEL; DEPOSITION BOUNDARIES; MASK;

MICROMACHINING;

EID: 32044467388     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. L. Ma & E. Antonsson, "Robust mask-layout and process synthesis" J. of Microelectromechanical Systems vol. 12, no. 5, pp. 728-729 (2003)
2. V. Venkataraman, R. Sarma & S. Ananthasuresh, "Part to Art: Basis for a Systematic Geometric Design Tool for Surface Micromachined MEMS" Proceedings of the ASME Design Engineering Technical Conferences 2000 pp. 1-14 (2000)
3. S. Cho, K. Lee & T. Kim, "Development of a geometry-based process planning system for surface micromachining" Int. J. of Production Research vol. 40, no. 5, pp. 1275-1293 (2002)
4. C. Jorgensen & V. Yarberry, "A 3D Geometry Modeler for the SUMMiT V MEMS Designer" Modeling and Simulation of Microsystems 2001 pp. 594-597 (2001)