Development of a geometry-based process planning system for surface micromachining

International Journal of Production Research

Volumn 40, Issue 5, 2002, Pages 1275-1293

  Cho, Sungwook ^a   Lee, Kunwoo ^a   Kim, Tae Wan ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTATIONAL GEOMETRY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DEPOSITION; ETCHING; MASKS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION; PHOTOLITHOGRAPHY; POLYSILICON;

PROCESS PLANNING; PROCESS SEQUENCE GENERATION; SURFACE MICROMACHINING;

PLANNING;

EID: 0037139689     PISSN: 00207543     EISSN: None     Source Type: Journal    
DOI: 10.1080/00207540110115544     Document Type: Article

References (11)

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5. MEMS computer-aided design
6. Ray casting for modeling solids
7. A computer-aided design system for microelectromechanical systems (MEMCAD)
8. Micromechanics and MEMS