Finite element based reduced order modeling of micro electro mechanical systems (MEMS)

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 684-687

  Ostergaard, Dale ^a   Gyimesi, Miklos ^a  

^a ANSYS INC   (United States)

Author keywords

Coupled analysis; Finite elements (FE); Micro Electromechanical Systems (MEMS); Reduced order modeling (ROM)

Indexed keywords

COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; HARMONIC ANALYSIS; MICROMACHINING; TIME DOMAIN ANALYSIS;

CIRCUIT ELEMENTS; COUPLED ANALYSIS; MULTIPLE PHYSICS; REDUCED ORDER MODELING (ROM);

MICROELECTROMECHANICAL DEVICES;

EID: 6344278854     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. S. Groothuis, "Analyzing Microminiature Devices", ANSYS Solutions, Vol. 1, No. 1, Spring 1999.
2. ANSYS Release 5.6 User Manuals, 1999.
3. D. Ostergaard, "Tooling-Up for MicroElectroMechanical Systems (MEMS)", ANSYS Solutions, Vol. 1, No. 3, Winter 1999.
4. M. Gyimesi, D. Ostergaard, "Electro-Mechanical Transducer for MEMS in ANSYS", Proc. 1999 Int. Conf. on Modeling and Simulation of Microsystems, April 19-21, 1999.
5. Guyan, R.J., "Reduction of Stiffness and Mass Matrices", AIAA Journal, Vol. 3, No. 2, Feb. 1965.
6. Romanowicz, B.F., Methodology for the Modeling and Simulation of Microsystems, Kluwer Academic Publishers, Norwell Mass., 1998.